Surface Texturing of CVD Diamond Assisted by Ultrashort Laser Pulses

Trucchi, Daniele M.; Bellucci, A.; Girolami, M.; Mastellone, Matteo; Orlando, S.

doi:10.3390/coatings7110185

Cited by 46 publications

(34 citation statements)

References 92 publications

(119 reference statements)

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“…CVD is another method of deposition under vacuum and is the process of chemically reacting a volatile compound from a material to be deposited with other gases, in order to produce a non-volatile thermal properties-this means that one can combine deposition methods, like layers of PVD and CVD, in the same coating [23][24][25][26].…”

Section: Introductionmentioning

confidence: 99%

Sputtering Physical Vapour Deposition (PVD) Coatings: A Critical Review on Process Improvement and Market Trend Demands

et al. 2018

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Physical vapour deposition (PVD) is a well-known technology that is widely used for the deposition of thin films regarding many demands, namely tribological behaviour improvement, optical enhancement, visual/esthetic upgrading, and many other fields, with a wide range of applications already being perfectly established. Machining tools are, probably, one of the most common applications of this deposition technique, sometimes used together with chemical vapour deposition (CVD) in order to increase their lifespan, decreasing friction, and improving thermal properties. However, the CVD process is carried out at higher temperatures, inducing higher stresses in the coatings and substrate, being used essentially only when the required coating needs to be deposited using this process. In order to improve this technique, several studies have been carried out optimizing the PVD technique by increasing plasma ionization, decreasing dark areas (zones where there is no deposition into the reactor), improving targets use, enhancing atomic bombardment efficiency, or even increasing the deposition rate and optimizing the selection of gases. These studies reveal a huge potential in changing parameters to improve thin film quality, increasing as well the adhesion to the substrate. However, the process of improving energy efficiency regarding the industrial context has not been studied as deeply as required. This study aims to proceed to a review regarding the improvements already studied in order to optimize the sputtering PVD process, trying to relate these improvements with the industrial requirements as a function of product development and market demand.

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Section: Introductionmentioning

confidence: 99%

Sputtering Physical Vapour Deposition (PVD) Coatings: A Critical Review on Process Improvement and Market Trend Demands

et al. 2018

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“…The existence of HSFL allows for the generation of much smaller periods Λ down to ~λ/4–λ/5 in the case of diamond 30 – 32 . Indeed, HSFL with periodicities down to ~λ/8 can be found when graphitic-like phases are generated 33 .…”

Section: Introductionmentioning

confidence: 99%

Tailoring diamond’s optical properties via direct femtosecond laser nanostructuring

Martínez-Calderón

Azkona

Casquero

et al. 2018

Sci Rep

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We demonstrate a rapid, accurate, and convenient method for tailoring the optical properties of diamond surfaces by employing laser induced periodic surface structuring (LIPSSs). The characteristics of the fabricated photonic surfaces were adjusted by tuning the laser wavelength, number of impinging pulses, angle of incidence and polarization state. Using Finite Difference Time Domain (FDTD) modeling, the optical transmissivity and bandwidth was calculated for each fabricated LIPSSs morphology. The highest transmission of ~99.5% was obtained in the near-IR for LIPSSs structures with aspect ratios of the order of ~0.65. The present technique enabled us to identify the main laser parameters involved in the machining process, and to control it with a high degree of accuracy in terms of structure periodicity, morphology and aspect ratio. We also demonstrate and study the conditions for fabricating spatially coherent nanostructures over large areas maintaining a high degree of nanostructure repeatability and optical performance. While our experimental demonstrations have been mainly focused on diamond anti-reflection coatings and gratings, the technique can be easily extended to other materials and applications, such as integrated photonic devices, high power diamond optics, or the construction of photonic surfaces with tailored characteristics in general.

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“…The periodical ripples or laser-induced periodic surface structure (LIPSS) derive from the interference of the incident laser with quasi-monochromatic plasmons or among themselves. In this regime, the produced periodicity of LIPSS, approximately λ/4, is much smaller than λ [27], and can be calculated as Λ = λ/2n = 167 nm for normal incidence, where λ = 800 nm is the wavelength of the fs laser applied in this work and n = 2.40 is the real part of the complex refractive index of diamond [28]. The orientation of the LIPSS is perpendicular to the laser polarization direction.…”

Section: Influence Of Effective Number Of Pulses On Cvd Diamond Coatimentioning

confidence: 95%

Study on Femtosecond Laser Processing Characteristics of Nano-Crystalline CVD Diamond Coating

Wei

Han

et al. 2019

Applied Sciences

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Ultra-short pulse laser interaction with diamond materials has attracted extensive interest in micro- and nano-machining, especially for the fabrication of micro tools, because of the straightforward method and high precision. Thanks to the development of chemical vapor deposition (CVD) technology, high-quality CVD diamonds are employed in more varieties of tools as performance-enhancing coatings. The purpose of the experiments reported here was to explore the machinability of CVD diamond coating under the irradiation of femtosecond (fs) pulsed laser. The factor-control approach was adopted to investigate the influence of scanning speed, single pulse energy and repetition rate on the surface quality and carbon phase transition of CVD diamond coating. The material removal rate and surface roughness were evaluated. The interaction mechanism of scanning speed, single pulse energy, and repetition rate were discussed, and the fs laser ablation threshold of CVD diamond coating was calculated. It was demonstrated that two ablation mechanisms (weak and intensive) were in existence as evidenced by the distinct surface morphologies induced under different processing conditions. A strong dependence on the variation of scanning speed and pulse energy is identified in the examination of surface roughness and removal rate. Lorentzian–Gaussian deconvolution of Raman spectra illustrates that fs laser irradiation yields a strong modification effect on the coating and release the compressive stress in it. Furthermore, a newly defined parameter referring to the fs laser energies applied to unit volume was introduced to depict the degree of ablation and the Taguchi method was used to figure out the significance of different parameters. The ablation threshold of CVD diamond coating at the effective pulses of 90 is calculated to be 0.138 J/cm2.

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Surface Texturing of CVD Diamond Assisted by Ultrashort Laser Pulses

Cited by 46 publications

References 92 publications

Sputtering Physical Vapour Deposition (PVD) Coatings: A Critical Review on Process Improvement and Market Trend Demands

Sputtering Physical Vapour Deposition (PVD) Coatings: A Critical Review on Process Improvement and Market Trend Demands

Tailoring diamond’s optical properties via direct femtosecond laser nanostructuring

Study on Femtosecond Laser Processing Characteristics of Nano-Crystalline CVD Diamond Coating

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