“…In cross-scale machining, many processing methods are difficult to reflect more cost efficient, so research on the micro-machining technology which is suitable for metal components with micro/meso scale and has the advantages of being economic, practical and efficient has been deserved more and more attention.WEDM (wire-cut electrical discharge machining) with its features of non-contact, high cost performance, suitable for single-part or small-lot production, has a unique advantage in the 2D contour processing. Although some scholars [4][5][6][7][8][9][10][11][12] had done a lot of research work in this aspect, more perfect processing methods are lacked on metal components with micro/meso scale, and the defects, such as the distortion of cantilever and the bend of sharp corners, are prone to appear.According to the actual demand of a device, the processing of thin nickel plate (0.6 mm thick, hard N4) with 2D micro/meso scale structure by WEDM are carried out. The method of processing stability for micro/meso scale structure are studied through the development and adjustment of machining parameters, The solution to problems of the defects, such as the cantilever distortion and sharp corners bending etc., are explored.…”