Surface Structure Features of Polished Fused Silica Revealed by Etching and Thermal Treating

Minghong, 杨明红 Yang; Yuanan, 赵元安 Zhao; Haiyang, 单海洋 Shan; Kui, 易葵 Yi; Jianda, 邵建达 Shao

doi:10.3788/cjl201239.0803004b

Cited by 5 publications

(3 citation statements)

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“…But, under the same observation condition, there is a clear difference on surface quality among different grinding processes after etching 100nm. [4] As shown in Figure 3, after the completion of chemical etching, the W5 grinded surface only has some pits, in contrast, the surface without W5 grinding has more serious surface scratches and other flaws. …”

Section: Grinding Testsmentioning

confidence: 95%

Influences of grinding and polishing parameters on the quality of super smooth surface

Jin¹,

Tong²,

Jiao³

et al. 2014

SPIE Proceedings

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Firstly, in this paper, a reasonable process flow is designed and the surface roughness of each procedure is tested. Secondly, the influences of particle size distribution of slurry on the quality of super smooth surface are studied, and then the conclusions are obtained that large span distribution of slurry will lead to surface scratches. Lastly, the effects of aging and ratios of polishing pad on the quality of super smooth surface are researched, and then some specific process parameters are gained such as shaving cycle and asphalt ratios in different environments.

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Section: Grinding Testsmentioning

confidence: 95%

Influences of grinding and polishing parameters on the quality of super smooth surface

Jin¹,

Tong²,

Jiao³

et al. 2014

SPIE Proceedings

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show abstract

“…For a specified irradiated laser fluence, compared with a high-reflection coating, the laser intensity of a coating with partial or high transmittance is stronger at the substrate–coating interface, and subsurface impurity defects are more likely to cause damage under laser irradiation. In addition, the electron beam deposition process often requires the substrate to be heated, and subsurface impurities can easily migrate to the surface during heating [ 7 , 8 ] . Researchers have simulated the effect of impurity particles on the LIDT of substrates using Mie scattering theory and impurity defect absorption models [ 9 , 10 ] .…”

Section: Introductionmentioning

confidence: 99%

Effect of subsurface impurity defects on laser damage resistance of beam splitter coatings

Zhu

Shi

et al. 2023

High Pow Laser Sci Eng

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The laser-induced damage threshold (LIDT) of plate laser beam splitter (PLBS) coatings is closely related to the subsurface absorption defects of the substrate. Herein, a two-step deposition temperature method is proposed to understand the effect of substrate subsurface impurity defects on the LIDT of PLBS coatings. Firstly, BK7 substrates are heat-treated at three different temperatures. The surface morphology and subsurface impurity defect distribution of the substrate before and after the heat treatment are compared. Then, a PLBS coating consisting of alternating HfO2–Al2O3 mixture and SiO2 layers is designed to achieve a beam-splitting ratio (transmittance to reflectance, s-polarized light) of approximately 50:50 at 1053 nm and an angle of incidence of 45°, and it is prepared under four different deposition processes. The experimental and simulation results show that the subsurface impurity defects of the substrate migrate to the surface and accumulate on the surface during the heat treatment, and become absorption defect sources or nodule defect seeds in the coating, reducing the LIDT of the coating. The higher the heat treatment temperature, the more evident the migration and accumulation of impurity defects. A lower deposition temperature (at which the coating can be fully oxidized) helps to improve the LIDT of the PLBS coating. When the deposition temperature is 140°C, the LIDT (s-polarized light, wavelength: 1064 nm, pulse width: 9 ns, incident angle: 45°) of the PLBS coating is 26.2 J/cm2, which is approximately 6.7 times that of the PLBS coating deposited at 200°C. We believe that the investigation into the laser damage mechanism of PLBS coatings will help to improve the LIDT of coatings with partial or high transmittance at laser wavelengths.

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“…As the most ideal optical element material, fused silica has many excellent properties, which is less affected by temperature in ultra-precision machining [2,3]. Which are widely used as transparency optics for high power output systems [4].…”

Section: Introductionmentioning

confidence: 99%

Theoretical basis and performance research on advanced non-contacting ion beam manufacturing process for optical materials

Li,

DasenWang,

Yang

et al. 2023

J. Phys.: Conf. Ser.

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Ultra-smooth surface is very important for the performance of high energy optical system in the defence field. Low quality optical elements will cause energy loss and affect the performance of the optical system. Ultra-precision manufacturing technology of optical components is the key technology to obtain high quality optical components. As an advanced ultra-precision and no-contact surface processing technology, Ion Beam Manufacturing (IBM) was studied. Based on the analysis of the relationship between the ion beam current density distribution parameters obtained by faraday scan and the removal function, more effective removal function calculation method was found, the removal function model for IBF fused silica was established. The Molecular Dynamics(MD)simulation to study interaction between incident ion and optical substrate. Ion particle motion behaviour were obtained under different incident energies. The effect of incidence angle on surface roughness were carried out, lower surface roughness by smaller angle incident, ultra-precision surface of optical components were obtained by IBF experiments.

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Surface Structure Features of Polished Fused Silica Revealed by Etching and Thermal Treating

Cited by 5 publications

References 0 publications

Influences of grinding and polishing parameters on the quality of super smooth surface

Influences of grinding and polishing parameters on the quality of super smooth surface

Effect of subsurface impurity defects on laser damage resistance of beam splitter coatings

Theoretical basis and performance research on advanced non-contacting ion beam manufacturing process for optical materials

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