Surface roughness influence on the quality factor of high frequency nanoresonators

Palasantzas, G.

doi:10.1063/1.2874790

Cited by 14 publications

(6 citation statements)

References 33 publications

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“…While extrinsic damping can often be eliminated with a better design, intrinsic energy loss sets a fundamental limit for the device performance. The different known mechanisms of intrinsic dissipation include thermo-elastic damping 16,17 (TED), Akhiezer damping, [18][19][20] non-linear coupling between mechanical modes, [21][22][23][24] surface mediated losses, 25,26 and dissipation due to defects. [27][28][29]41 Intrinsic dissipation is a thermo-mechanical phenomena that involve coupling between two fields: mechanical deformation and thermal vibrations.…”

Section: Introductionmentioning

confidence: 99%

Intrinsic dissipation in a nano-mechanical resonator

Kunal¹,

Aluru²

2014

Journal of Applied Physics

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We investigate the effect of size on intrinsic dissipation in nano-structures. We use molecular dynamics simulation and study dissipation under two different modes of deformation: stretching and bending mode. In the case of stretching deformation (with uniform strain field), dissipation takes place due to Akhiezer mechanism. For bending deformation, in addition to the Akhiezer mechanism, the spatial temperature gradient also plays a role in the process of entropy generation. Interestingly, we find that the bending modes have a higher Q factor in comparison with the stretching deformation (under the same frequency of operation). Furthermore, with the decrease in size, the difference in Q factor between the bending and stretching deformation becomes more pronounced. The lower dissipation for the case of bending deformation is explained to be due to the surface scattering of phonons. A simple model, for phonon dynamics under an oscillating strain field, is considered to explain the observed variation in dissipation rate. We also studied the scaling of Q factor with initial tension, in a beam under flexure. We develop a continuum theory to explain the observed results.

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Section: Introductionmentioning

confidence: 99%

Intrinsic dissipation in a nano-mechanical resonator

Kunal¹,

Aluru²

2014

Journal of Applied Physics

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“…8c and d) it can be seen that Cr-Al-Cr film had higher surface roughness, than Ti-Al-Ti film. High surface roughness may have an influence on the nanocantilever resonant frequencies 21 and Q-factors 22 . Ti-Al-Ti nanocantilevers had the relatively flat surface, but they also had some disadvantages.…”

Section: Comparison Of Cr-al-cr With Ti-al-ti Nanocantileversmentioning

confidence: 99%

Resonance properties of multilayer metallic nanocantilevers

Uvarov¹,

Наумов²,

Amirov³

2013

SPIE Proceedings

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Resonant properties of the three-layer metallic cantilevers with 40 nm thickness are investigated. Two types of the nanocantilevers were fabricated: Cr-Al-Cr and Ti-Al-Ti. Resonant frequencies of the nanocantilevers were determined from the experimentally obtained resonant curves. Cantilever oscillations were excited by the electric force, the registration of the cantilever motion was performed by the optical lever method. Dependencies of the first and the second resonant frequencies on the cantilever length and width were experimentally obtained. The experimental data analysis and the comparison with the theoretical predictions were performed. Relations between the cantilever resonance properties and its dimensions and material are discussed.

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“…While extrinsic damping can often be minimized with improving engineering design, the intrinsic damping sets a fundamental limit for operation of the device. The known mechanisms of intrinsic damping in NEMS include the thermo-elastic dissipation, 13,14 phonon mediated losses, [15][16][17] and friction due to surface, 18,19 edges, 20,21 and defects. 22,23 Depending on the frequency of operation, each of these mechanisms becomes important in case of nano-resonators.…”

Section: Introductionmentioning

confidence: 99%

Phonon mediated loss in a graphene nanoribbon

Kunal

Aluru

2013

Journal of Applied Physics

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Periodic stretching of a string, under adiabatic condition (no thermal coupling with the environment), will increase its temperature. This represents the case of intrinsic damping where the energy associated with stretching motion is converted into thermal energy. We study this phenomenon in a graphene nanoribbon (GNR), a nano-string. We utilize classical molecular dynamics and study the scaling of dissipation rate (Q factor) with frequency. The dissipation is shown to result from strong non-linear coupling between the stretching vibration and the out-ofplane thermal phonons. A Langevin dynamics framework is developed to describe the out-of-plane phonon dynamics under in-plane stretching. The dissipation mechanism is analyzed using this framework. From the analysis, a bi-relaxation time model is obtained to explain the observed scaling of Q factor with frequency. We also compute the size and temperature dependence of Q factor. The decrease in Q factor with decrease in size (width) is shown to result from the elastic softening of GNR. V C 2013 AIP Publishing LLC. [http://dx.

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Surface roughness influence on the quality factor of high frequency nanoresonators

Cited by 14 publications

References 33 publications

Intrinsic dissipation in a nano-mechanical resonator

Intrinsic dissipation in a nano-mechanical resonator

Resonance properties of multilayer metallic nanocantilevers

Phonon mediated loss in a graphene nanoribbon

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