1999
DOI: 10.1149/1.1392687
|View full text |Cite
|
Sign up to set email alerts
|

Surface Recombination Velocity from Photocurrent Measurements: Validation and Applications

Abstract: Photocurrent measurements can provide an easy method for evaluating surface recombination velocity and for mapping this quantity over a silicon wafer. This method is validated for the characterization of Si-SiO 2 interfaces by comparison with surface-state density data measured in simultaneously processed capacitors. In addition, destructive and nondestructive approaches to this measurement are discussed and compared. The correlation to be expected between destructive and nondestructive measurements of surface… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
3
1

Citation Types

0
11
0

Year Published

2000
2000
2015
2015

Publication Types

Select...
6
1

Relationship

0
7

Authors

Journals

citations
Cited by 8 publications
(11 citation statements)
references
References 20 publications
0
11
0
Order By: Relevance
“…(B8) and (B11), respectively. Equations (6) and (12) are the fundamental equations of the present work. They allow us to calculate S for a given light excitation power and surface state density, with approximations listed in Appendix A.…”
Section: Knexpmentioning
confidence: 99%
See 1 more Smart Citation
“…(B8) and (B11), respectively. Equations (6) and (12) are the fundamental equations of the present work. They allow us to calculate S for a given light excitation power and surface state density, with approximations listed in Appendix A.…”
Section: Knexpmentioning
confidence: 99%
“…4 After the early theoretical investigations which apply to the surface the Shockley Read Hall formalism (SRH) and obtain an expression of the surface recombination velocity S, 5 surface recombination has been extensively explored using photoconductivity, 6,7 surface photovoltage measurements, 8 scanning electron microscopy, 9 cathodoluminescence, 10 or photoluminescence [11][12][13] on a wide range of materials including GaAs, 12 Si, 14 InP, 15 GaN, 16 InN, 17 ZnSe, 18 and alloys. 19 However, the immense majority of these works rely on the usual hypothesis that S, as defined by the SRH formalism, is proportional to the surface density of states, and is a fundamental parameter for describing the surface electronic properties.…”
Section: Introductionmentioning
confidence: 99%
“…In the electrolytical metal oxide semiconductor method [7,8] the wafer is contacted with conductive liquids on both sides. A laser beam scans the front surface and generates charge carriers diffusing to the back side of the wafer.…”
Section: Introductionmentioning
confidence: 99%
“…Knowledge of surface recombination in semiconductors is crucial for bipolar nanoelectronics [1], in particular for high surface-to-volume ratio structures such as nanowires [2]. As a result surface recombination has been extensively explored using photoconductivity [3,4], surface photovoltage measurements [5], scanning electron microscopy [6], cathodoluminescence [7], or photoluminescence [8][9][10] on a wide range of materials including GaAs [9], Si [11], InP [12], GaN [13], InN [14], ZnSe [15] and alloys [16]. The immense majority of these works rely on the fact that the surface recombination velocity S is a fundamental parameter for describing the surface electronic properties [17].…”
Section: Introductionmentioning
confidence: 99%