Surface profilometry of high aspect ratio features

Bauza, Marcin B.; Woody, Shane C.; Woody, B.; Smith, Stuart T.

doi:10.1016/j.wear.2010.03.028

Cited by 29 publications

(14 citation statements)

References 7 publications

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“…) are available for examining the condition of the surface. Yet, the data collected and presented in several papers (Mathia et al ., ; Stout and Blunt, ; Lonardo et al ., ; Schwenke et al ., ; Hocken et al ., ; Hansen et al ., ; Bauza et al ., ; Mathi et al ., ) confirm that none of these measuring methods, if used alone, can give an overall picture of the surface condition. Therefore, various measuring techniques should be employed to obtain complementary information which will enable proper evaluation of results and accurate conclusions.…”

Section: Introductionmentioning

confidence: 99%

The measurement and analysis of surface geometric structure of ceramic femoral heads

2013

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The surface functionality of interacting components is determined by evaluating geometric surface structure. Hence, the ceramic femoral heads originated from precision machining were subject to measurement and analysis with regard to roughness, surface damages and deviation from roundness. A variety of measurement techniques were applied in order to thoroughly examine the product quality. The obtained results proved in accordance with the specification: Ra was not greater than 0.05 µm, whereas Δ was less than 10 µm (5 µm) when ceramic balls were used in conjunction with a polyethylene (ceramic) socket. Additionally, the surface damages which can affect the life of a friction pair were analyzed.

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Section: Introductionmentioning

confidence: 99%

The measurement and analysis of surface geometric structure of ceramic femoral heads

2013

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“…Being capable of detecting contact and fingertip position this robotic gripper also has potential for in-situ dimensional measurement of the components of the assembly. The standing wave probes of this study have been researched as a coordinate measuring machine touch sensor and also as a scanning type probe used in surface profilometry [4,5,6]. In these studies it has been demonstrated that the dynamic force of the virtual tip (the volume encompassed by the oscillating fiber amplitude) can overcome attraction forces such as meniscus and electrostatic forces that are significant at these scales.…”

Section: Standing Wave Probe Fingertipsmentioning

confidence: 99%

Development of a Micro-scale Assembly Facility with a Three Fingered, Self-aware Assembly Tool and Electro-chemical Etching Capabilities

Chesna

Smith

Hastings

et al. 2012

Precision Assembly Technologies and Systems

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This abstract outlines current developments of a microassembly facility focusing on studies using a three fingered gripper. Individual fingers of the gripper comprise thin fibers ranging in diameter from 7 to 80 ∝m that are attached to quartz based oscillators and are capable of sensing proximity, contact, and controlling adhesion forces. To optimize gripper finger performance, an electrolytic etching facility has been used to selectively modify oscillator performance and this system is currently being developed for automated processing. To demonstrate current performance of the gripper system, a micro-CMM contact sensing probe has been assembled and a preliminary performance evaluation is presented.

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“…Commercially available surface profile measurement instruments, such as scanning electron microscopes (SEMs), optical profilers, and atomic force microscopes (AFMs), encounter unsolvable difficulties in the surface profile measurement of microstructures [15][16][17][18][19][20][21]. For instance, SEMs can carry out fast measurements with a high horizontal resolution of up to nanometers [17,18,22]. However, the result obtained by SEM has limited gray scales to characterize the surface variation in the vertical direction, that is, the vertical measuring scale has a lower resolution and cannot be quantified.…”

Section: Introductionmentioning

confidence: 99%

Surface Profile Measurement and Error Compensation of Triangular Microstructures Employing a Stylus Scanning System

Yin

et al. 2018

Journal of Nanomaterials

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Microstructure-based function components are widely used in precision engineering. Surface profile measurement is an essential tool to verify the manufacturing quality of microstructures and to enhance the working performance of the device employing microstructures as function components. However, highly accurate surface profile measurements are difficult to perform for microstructures owing to their complex surface topographies. In this paper, a measurement system is proposed for the surface profile measurement of microstructures. The main components of the measurement system are a precision displacement stage to move the workpiece, a homemade probing system with a diamond microstylus to sense the surface profile variation of the microstructures on the workpiece, and a vibration isolation table to reduce the disturbance of the measurement environment. In addition, the stability of the measurement was experimentally investigated. Microstructures with shape of equilateral right triangle were employed as the measurement specimen, and the surface profile of triangular microstructures was measured by employing two methods to correct errors caused by the specimen inclination and the radius of the stylus tip. The shape, depth, and period of the measured microstructures were also detected based on the results of the surface profile measurement. Experimental results demonstrate the feasibility of the proposed surface profile measurement for microstructures with complex surface topographies.

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Surface profilometry of high aspect ratio features

Cited by 29 publications

References 7 publications

The measurement and analysis of surface geometric structure of ceramic femoral heads

The measurement and analysis of surface geometric structure of ceramic femoral heads

Development of a Micro-scale Assembly Facility with a Three Fingered, Self-aware Assembly Tool and Electro-chemical Etching Capabilities

Surface Profile Measurement and Error Compensation of Triangular Microstructures Employing a Stylus Scanning System

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