Surface Profile Measurement and Error Compensation of Triangular Microstructures Employing a Stylus Scanning System

Abstract

Microstructure-based function components are widely used in precision engineering. Surface profile measurement is an essential tool to verify the manufacturing quality of microstructures and to enhance the working performance of the device employing microstructures as function components. However, highly accurate surface profile measurements are difficult to perform for microstructures owing to their complex surface topographies. In this paper, a measurement system is proposed for the surface profile measurement of microstructures. The main components of the measurement system are a precision displacement stage to move the workpiece, a homemade probing system with a diamond microstylus to sense the surface profile variation of the microstructures on the workpiece, and a vibration isolation table to reduce the disturbance of the measurement environment. In addition, the stability of the measurement was experimentally investigated. Microstructures with shape of equilateral right triangle were employed as the measurement specimen, and the surface profile of triangular microstructures was measured by employing two methods to correct errors caused by the specimen inclination and the radius of the stylus tip. The shape, depth, and period of the measured microstructures were also detected based on the results of the surface profile measurement. Experimental results demonstrate the feasibility of the proposed surface profile measurement for microstructures with complex surface topographies.

A Review on Advanced Monitoring and Identifying the Status of Grinding Machine Using Machine Learning Algorithms

“…The surface texture gives the peaks and valleys of the profile generated from the ground surface represented by a variable like surface roughness. It also contains the surface integrity of the workpiece material, where the change in the structural behavior affects the hardness and the residual stress that lead to the formation of cracks in the material (55,56).…”

Non-equidistant scanning path generation for the evaluation of surface curvature in metrological scanning probe microscopes

“…The concept of curvature measure [21] is a generalization of the Gaussian and mean curvatures for convex and smooth objects. It was subsequently extended to triangulations, digitized objects, and sub-analytic sets by P. Wintgen [32] and M. Zähle [33] by the introduction of normal cycles, which is the integration current defined by the graph of the Gaussian map in equation (2), and it serves as basics of the generalization of the curvatures in non-smooth geometry [34,35]. The curvature measures are typically denoted by µ k , and in the smooth case, we have…”

“…where ⟨•|•⟩ denotes the scalar product and ū = 1 3 (⃗ u i +⃗ u j +⃗ u k ). The measure µ (0) is the corrected area density of the given triangle, and µ (1) and µ (2) are the corrected mean and Gaussian curvature density, respectively. Further, µ (X,Y) is the trace of the corrected second fundamental form along arbitrary directions X and Y, as an alternation of µ 3 in equation ( 5) for corrected normal ⃗ u. µ (X,Y) can be used to determine the distance of the corrected normal ⃗ u from the ground normal ⃗ n, as a measure of the quality of the choice of corrected normal.…”

“…With the capability of integration with positioning sensors (e.g. interferometers [1]), SPMs are not only widely used as quantitative tools in various fields of scientific research, but they are also developing rapidly for manufacturing and industrial applications, especially for the surface evaluation of microstructures [2][3][4][5][6].…”

Chromatic Confocal Displacement Sensor with Optimized Dispersion Probe and Modified Centroid Peak Extraction Algorithm

“…Firstly, CCT belongs to the noncontact methods without contacting the sample, avoiding harm to the soft or coated surface. Sometimes, the contact probe cannot reach the narrow corners in the coordinate measuring machine (CMM) or stylus profiler [6,7]. By contrast, the optical sensors can help to provide better solutions for these problems, such as laser triangulation, laser interferometry, grating interferometry, and CCT, to name but a few [8,9,10].…”