In applications of superconducting devices, the crystalline texture of high-quality YBa 2 Cu 3 O 7−x thin films is of primary importance. The preferred orientation of the films can be essentially controlled by means of the substrate temperature, T s . In order to study the dependence of the film texture on different T s , a series of films were deposited on YSZ substrates by the on-axis pulsed-laser ablation technique. The substrate temperature was varied from 600 • C to 800 • C while the rest of the growth parameters remained the same. Various analytical techniques, including x-ray diffraction, scanning electron microscopy, micro-Raman spectroscopy and the four-point probe method, were applied to characterize the films. At around T s = 700 • C, the best films with the smoothest surface morphology, lowest FWHM of the rocking curve and highest in-plane texture were obtained. The resultant J c in excess of 1 × 10 6 A cm −2 at 77 K and T c around 91 K were also achieved at this temperature.