Surface modification of iron thin films into corrosion resistant property by F<inf>2</inf> laser

Abstract

Fig.2 Micro-pattern of the laser irradiated Fe thin films after NHO 3 chemical etching 200 μm Fe 3 O 4 /Fe thin films slide Abstract A vacuum-UV F 2 laser of 157 nm wavelength induced strong oxidation of Fe thin film surface to show the chemical resistance to pseudo seawater and HNO 3 aqueous solution for selective metallization on silica glass substrate. The strong oxidation reactions on the surface and in the depth direction were confirmed by X-ray photoelectron spectroscopy. The corrosion resistance of the F 2 laser irradiated samples was also supported by an electrochemical test. A fine pattern of the F 2 laser irradiated Fe thin film was successfully formed after the HNO 3 chemical etching.