Surface-micromachined polysilicon MOEMS for adaptive optics

Comtois, John H.; Michalicek, Adrian; Cowan, William D.; Butler, Jeffrey T.

doi:10.1016/s0924-4247(99)00204-6

Cited by 26 publications

(9 citation statements)

References 9 publications

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“…Another method to further increase the flatness of the surface micromachined mirror was introduced in Ref. 22. The novel assembly approach demonstrated in this work can be utilized to assemble rotary micromirrors from microparts fabricated from different micromachining processes.…”

Section: Discussionmentioning

confidence: 99%

Novel approach for microassembly of three-dimensional rotary MOEMS mirrors

Wang

Mills

Cleghorn

2009

J. Micro/Nanolith. MEMS MOEMS

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We present a novel approach to construct 3-D 1 ϫ N rotary micromirrors, which are fundamental components in optical switching systems. A rotary micromirror consists of two microparts: a rotary micromotor and a micromirror. Both of the two microparts are fabricated with PolyMUMPs, ™ ͑MEMSCAP, Research Triangle Park, North Carolina͒, a surface micromachining process. A sequential robotic microassembly process is developed to join the two microparts together to construct the 3-D device. To achieve high positioning accuracy and strong mechanical connection, the micromirror is joined to the micromotor using an adhesive mechanical fastener. The mechanical microjoint has self-alignment capability and provides a temporary joint between the two microparts. The adhesive bonding creates a strong permanent connection between the two microparts. The adhesive mechanical fastener does not require extra supporting plates to fix the micromirror, which simplifies the microassembly process and makes it possible to automatically assemble the rotary micromirror. A hybrid manipulation strategy, which includes pick-and-place and pushing-based micromanipulations, is utilized to assemble the micromirror onto the micromotor. The pick-and-place manipulation has the ability to globally position the micromirror with multiple degrees of freedom. The pushing-based manipulation can achieve high positioning accuracy. This novel approach provides great flexibility and high accuracy for assembling the complex micromirror.

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Section: Discussionmentioning

confidence: 99%

Novel approach for microassembly of three-dimensional rotary MOEMS mirrors

Wang

Mills

Cleghorn

2009

J. Micro/Nanolith. MEMS MOEMS

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“…The strategy proved to be successful and resulted in numerous research prototypes and commercial devices [1,2]. Although bi-stable digital devices performed remarkably well, the analog counterparts with continuously variable positioning enhance functionality in many applications, such as optical switching [3] and spatial light modulators for image projection [4]. Another approach to avoiding the pull-in effect is to use electrode charge instead of electrode voltage to adjust the position.…”

Section: Introductionmentioning

confidence: 99%

Robust Control of an Electrostatic Microelectromechanical Actuator

Karkoub¹,

Zribi²

2008

TOMECHJ

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A continuing trend these days is the use of micro-electro-mechanical actuators with electronic circuitry to fabricate MEMS devices such as micro-switches, hard disks, optical micro-mirrors ... One of the problems with the electrostatic MEMS actuator is that when an electrical voltage is applied to these devices, the micro-actuators undergo a residual vibration before reaching their permanent position. This paper addresses the control of an electrostatic microelectromechanical actuator to reduce the vibration effect on its performance. A feedback linearization controller, a static sliding mode controller and a dynamic sliding mode controller are designed for the microelectromechanical system. The stability of the closed loop system is proved. Simulation results indicate that the proposed control schemes work well.

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“…Regarding MEMS micro mirror development for AO most activities so far have been focussed on mechanical stroke and surface quality yielding devices with up to some tens or hundreds of actuators with no drive electronics on-chip [17][18][19]. The Fraunhofer IPMS on the other hand, has been developing large-scale integrated analog micro mirror arrays for several years with up to 1 MPixels for an application in sub-µ lithography [20], now exploiting this technology also for the realization of a 240 x 200 piston-type Micro Mirror Array (MMA) for Adaptive Optics.…”

Section: Introductionmentioning

confidence: 99%

MEMS phase former kit for high-resolution wavefront control

et al. 2005

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The MEMS Phase Former Kit developed by the Fraunhofer IPMS is a complete Spatial Light Modulator system based on a piston-type Micro Mirror Array (MMA) for the use in high-resolution, high-speed optical phase control. It has been designed for an easy system integration into an user-specific environment to offer a platform for first practical investigations to open up new applications in Adaptive Optics. The key component is a fine segmented 240 x 200 array of 40 µm piston-type mirror elements capable of 400 nm analog deflection for a 2pi phase modulation in the visible. Each mirror can be addressed and deflected independently by means of an integrated CMOS backplane address circuitry at an 8bit height resolution. Full user programmability and control is provided by a newly developed comfortable driver software for Windows XP based PCs supporting both a Graphical User Interface (GUI) for stand-alone operation with pre-defined data patterns as well as an open ActiveX programming interface for a closed-loop operation with real-time data from an external source. An IEEE1394a FireWire interface is used for high-speed data communication with an electronic driving board performing the actual MMA programming and control allowing for an overall frame rate of up to 500 Hz. Successful proof-of-concept demonstrations already have been given for eye aberration correction in ophthalmology, for error compensation of leightweight primary mirrors of future space telescopes and for ultra-short laser pulse shaping. Besides a presentation of the basic device concept and system architecture the paper will give an overview of the obtained results from these applications

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Surface-micromachined polysilicon MOEMS for adaptive optics

Cited by 26 publications

References 9 publications

Novel approach for microassembly of three-dimensional rotary MOEMS mirrors

Novel approach for microassembly of three-dimensional rotary MOEMS mirrors

Robust Control of an Electrostatic Microelectromechanical Actuator

MEMS phase former kit for high-resolution wavefront control

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