Abstract-This paper describes a novel microassembly system that can be used to construct out-of-plane three-dimensional (3-D) microstructures. The system makes use of a surface-micromachined microgripper that is solder bonded to a robotic manipulator. The microgripper is able to grasp a micropart, remove it from the chip, reorient it about two independent axes, translate it along the , and axes to a secondary location, and join it to another micropart. In this way, out-of-plane 3-D microstructures can be assembled from a set of initially planar and parallel surface micromachined microparts. The microgripper is 380 410 m in size. It utilizes three geometric features for operation: 1) compliant beams to allow for deflection at the grasping tips; 2) self-tightening geometry during grasping; and 3) 3-D interlocking geometry to secure a micropart after the grasp. Each micropart has three geometric features built into its body. The first is the interlock interface feature that allows it to be grasped by the microgripper. The second is a tether feature that secures the micropart to the substrate, and breaks away after the microgripper has grasped the micropart. The third is the snap-lock feature, which is used to join the micropart to other microparts.[1061]Index Terms-Compliant, joint, microelectromechanical systems (MEMS), microgripper, microassembly, microstructure, micropart, snap-lock microjoint, three-dimensional (3-D).
-This paper describes the design and development of a 6 degree of freedom robotic manipulator used in the assembly of three-dimensional MEMS (micro electromechanical systems) microstructures. The robot employs a highly innovative mechanical design for the rotational axes to provide unprecedented access to a microchip substrate for microassembly operations. The first three axes of the robotic manipulator are orthogonally mounted linear stages providing Cartesian positioning of the chips beneath the end effector (microgripper). A rotational stage (alpha) mounted on the distal end of these three Cartesian axes allows the MEMS chip to be rotated. Two more degrees of freedom (beta and gamma) are serially mounted to the base frame, allowing for two degrees of rotation of the end effector. This configuration permits assembly of micro-parts on the surface of a MEMS chip at any orientation angle to the surface, within the limits of the workspace of the manipulator and the resolution of the motors. The end effector employs a standard tungsten probe with a passive microgripper bonded to it, which is used for grasping micro-parts. A software system has been developed to allow automatic operation of the manipulator. Preliminary assembly tests confirm the usefulness of the proposed design.
This work highlights the most crucial service and technology-related needs, as perceived by trained prosthetic practitioners, of populations requiring lower limb prosthetic treatment around the world. Additionally, the results may be used to prioritize prosthetic-related health-care initiatives led by other researchers, governments and organizations working to improve services internationally.
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