Surface Micromachined MEMS Accelerometers on Flexible Polyimide Substrate

Gonenli, I. E.; Çelik‐Butler, Zeynep; Butler, Donald P.

doi:10.1109/jsen.2011.2136376

Cited by 32 publications

(7 citation statements)

References 28 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…4-A. Have enjoyed more commercial success [22] however, these commercial sensors are designed for general purpose applications and therefore the bandwidth is larger. Hence such sensors are designed to have a large natural frequency which needs larger stiffness constant (k) and smaller proof mass (m).…”

Section: Mems Structurementioning

confidence: 99%

Low Cost MEMS accelerograph: structure, operation and application to seismology

Bakir

Elksasy

Salam

et al. 2023

Delta University Scientific Journal

View full text Add to dashboard Cite

Micro Elector Mechanical Systems (MEMS) sensors enable a wide range of different applications in many fields: among others, in the last decade the use of MEMS accelerometers for seismology-related applications has grown exponentially. In this paper, we do a comprehensive review of MEMS accelerometers: Operating Principle, technical specifications, types, performance, Comparison with Geophone. We introduce the applications within seismology and earth sciences related disciplines. We introduce how to use MEMS accelerometer and geophone to build a low Coast earthquake monitoring unit. Moreover, we will discuss the performance of MEMS accelerometer, geophone by conducting a practical experiment to measure one of the explosions that occur near the city of Helwan,

show abstract

Section: Mems Structurementioning

confidence: 99%

Low Cost MEMS accelerograph: structure, operation and application to seismology

Bakir

Elksasy

Salam

et al. 2023

Delta University Scientific Journal

View full text Add to dashboard Cite

show abstract

“…This accelerometer is characterized by its small size and low power consumption and has the ability to measure acceleration in the three axes in a range of ± 3 g with a signal conditioning voltage output [80]. The ADXL series MEMS accelerometers use a comb finger-type differential capacitive MEMS structure and have excellent sensitivity, low drift, good noise performance and simplicity [81][82][83]. The sensor measures vibrations due the capacitance variation in differential capacitors, and it can be used to measure the static acceleration of gravity and accelerations due to motion, shock or vibration.…”

Section: Adxl-335 Accelerometermentioning

confidence: 99%

MEMS accelerometers for mechanical vibrations analysis: a comprehensive review with applications

Varanis

Silva

Mereles

et al. 2018

J Braz. Soc. Mech. Sci. Eng.

View full text Add to dashboard Cite

In this paper, the use of MEMS accelerometers for measuring mechanical vibrations is presented. Also a wide review of the literature is performed by presenting the uses of the MEMS accelerometers in a great number of applications. These sensors are known for their low prices, low power consumption and low sizes, which enhance their use in applications such as energy harvesters, monitoring processes and for educational purposes. In order to propose these sensors for measuring vibrations, a complete evaluation of the MEMS accelerometers was performed by measuring amplitudes and frequencies of oscillations and comparing their dynamic characteristics with other accelerometers with higher precision. Moreover, two experiments were conducted: In the first one, the measurements of the amplitude given by a MEMS and a standard accelerometer while being excited with sinusoidal waves with different frequencies using a vibration exciter were taken and compared. For the second experiment, three MEMS sensors and a piezoelectric accelerometer were used to measure the accelerations of a 3-DOF shear-building excited by an unbalanced DC motor. The signals obtained were compared in the time and frequency domains; for the last case, the wavelet transform, the wavelet coherence and the power spectrum density were used.

show abstract

“…The accelerometers simply act as tilt sensors that detect the orientation of the devices with respect to gravity. Capacitive accelerometers have also been fabricated on flexible polyimide substrate and demonstrated successfully [9].…”

Section: Introductionmentioning

confidence: 99%

Fabrication, Modeling, and Evaluation of a Digital Output Tilt Sensor With Conductive Microspheres

et al. 2017

View full text Add to dashboard Cite

Abstract-Recent advances in wearable computing ask for bendable and conformable electronic circuits and sensors, allowing an easy integration into everyday life objects. Here, we present a novel flexible tilt sensor on plastic using conductive microspheres as gravity sensitive pendulum. The sensor provides a digital output of the measurement signal without the need for any additional electronics (e.g. amplifiers) close to the sensing structure. The sensor is fabricated on a free-standing polyimide foil with SU-8 photoresist defining the cavity for the pendulum. The pendulum consists of freely movable conductive microspheres which, depending on the sense of gravity, connect different electric contacts patterned on the polyimide foil. We develop a model of the sensor and identify the amount of microspheres as one of the key parameters in the sensor design which influences the performance of the sensor. The presented tilt sensor with eight contacts achieves an angular resolution of 22.5• with a hysteresis of 10• and less at a tilt of the sensor plane of 50• . Analysis of the microsphere movements reveals a response time of the sensor at ∼ 50 ms.

show abstract

Surface Micromachined MEMS Accelerometers on Flexible Polyimide Substrate

Cited by 32 publications

References 28 publications

Low Cost MEMS accelerograph: structure, operation and application to seismology

Low Cost MEMS accelerograph: structure, operation and application to seismology

MEMS accelerometers for mechanical vibrations analysis: a comprehensive review with applications

Fabrication, Modeling, and Evaluation of a Digital Output Tilt Sensor With Conductive Microspheres

Contact Info

Product

Resources

About