No abstract

Electronics on very thin substrates have shown remarkable bendability, conformability and lightness, which are important attributes for biological tissues sensing, wearable or implantable devices. Here we propose a wafer-scale process scheme to realize ultra flexible, lightweight and transparent electronics on top of a 1-mm thick parylene film that is released from the carrier substrate after the dissolution in water of a polyvinyl-alcohol layer. The thin substrate ensures extreme flexibility, which is demonstrated by transistors that continue to work when wrapped around human hairs. In parallel, the use of amorphous oxide semiconductor and high-K dielectric enables the realization of analogue amplifiers operating at 12 V and above 1 MHz. Electronics can be transferred on any object, surface and on biological tissues like human skin and plant leaves. We foresee a potential application as smart contact lenses, covered with light, transparent and flexible devices, which could serve to monitor intraocular pressure for glaucoma disease.

Recently, transition metal dichalcogenides (TMDCs) have attracted interest thanks to their large field effective mobility (>100 cm(2)/V · s), sizable band gap (around 1-2 eV), and mechanical properties, which make them suitable for high performance and flexible electronics. In this paper, we present a process scheme enabling the fabrication and transfer of few-layers MoS2 thin film transistors from a silicon template to any arbitrary organic or inorganic and flexible or rigid substrate or support. The two-dimensional semiconductor is mechanically exfoliated from a bulk crystal on a silicon/polyvinyl alcohol (PVA)/polymethyl methacrylane (PMMA) stack optimized to ensure high contrast for the identification of subnanometer thick flakes. Thin film transistors (TFTs) with structured source/drain and gate electrodes are fabricated following a designed procedure including steps of UV lithography, wet etching, and atomic layer deposited (ALD) dielectric. Successively, after the dissolution of the PVA sacrificial layer in water, the PMMA film, with the devices on top, can be transferred to another substrate of choice. Here, we transferred the devices on a polyimide plastic foil and studied the performance when tensile strain is applied parallel to the TFT channel. We measured an electron field effective mobility of 19 cm(2)/(V s), an I(on)/I(off)ratio greater than 10(6), a gate leakage current as low as 0.3 pA/μm, and a subthreshold swing of about 250 mV/dec. The devices continue to work when bent to a radius of 5 mm and after 10 consecutive bending cycles. The proposed fabrication strategy can be extended to any kind of 2D materials and enable the realization of electronic circuits and optical devices easily transferrable to any other support.

Recent advances in biomaterials, thin film processing, and nanofabrication offer the opportunity to design electronics with novel and unique capabilities, including high mechanical stability and biodegradation, which are relevant in medical implants, environmental sensors, and wearable and disposable devices. Combining reliable electrical performance with high mechanical deformation and chemical degradation remains still challenging. This work reports temperature sensors whose material composition enables full biodegradation while the layout and ultrathin format ensure a response time of 10 ms and stable operation demonstrated by a resistance variation of less than 0.7% when the devices are crumpled, folded, and stretched up to 10%. Magnesium microstructures are encapsulated by a compostable‐certified flexible polymer which exhibits small swelling rate and a Young's modulus of about 500 MPa which approximates that of muscles and cartilage. The extension of the design from a single sensor to an array and its integration onto a fluidic device, made of the same polymer, provides routes for a smart biodegradable system for flow mapping. Proper packaging of the sensors tunes the dissolution dynamics to a few days in water while the connection to a Bluetooth module demonstrates wireless operation with 200 mK resolution prospecting application in food tracking and in medical postsurgery monitoring.

Stretchable large‐area high‐performance amorphous oxide thin‐film electronics fabricated using locally reinforced composite elastomers or wavy structures are functional while elongated by >200% and after 4000 stretching and relaxation cycles. 2D stretchable sensors, amplifiers, and circuits for wireless power transmission are conformably wrapped around arbitrary 3D structures and enable sensor systems for electronic implants and skins.