Surface-micromachined electrostatic microrelay

Schiele, Ignaz; Huber, Jörg; Hillerich, B.; Kozlowski, F.

doi:10.1016/s0924-4247(97)01703-2

Cited by 47 publications

(27 citation statements)

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“…Each scheme has its own set of problems: (1) high power requirements and slow switching speed for thermal; (2) high incompatible voltages for electrostatic; and (3) high complexity, cost, and power requirements for magnetic [12,13,20]. Electrostatic actuation is most commonly used, and actuation voltage is minimized through the use of a compliant bridge or cantilever.…”

Section: Actuation Schemesmentioning

confidence: 99%

Fundamental studies of Au contacts in MEMS RF switches

2005

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Microelectromechanical systems (MEMS) radio frequency (RF) switches hold great promise in a myriad of commercial, aerospace, and military applications. However, there is little understanding of the factors determining the performance and reliability of these devices. Fundamental studies of hot-switched gold (Au) contacts were conducted using a micro/nanoadhesion apparatus as a switch simulator. Experiments were conducted in a well defined air environment under precisely controlled operating conditions. Fundamental properties were connected to performance with an emphasis on the effects of contact force and electric current on contact resistance (R), microadhesion, and reliability/durability. Electric current had the most profound effect on switch performance. Observations at low current (1-10 lA) include: (1) slightly higher R; (2) asperity creep; (3) high adhesion after rapid switching; (4) switch bouncing; and (5) reasonable durability. Conversely, observations at high current (1-10 mA) include: (1) slightly lower R; (2) melting; (3) no measurable adhesion; (4) less propensity for switch bouncing; (5) necking of contacts; and (6) poor reliability and durability due to switch shorting. Low current behavior was dominated by the propensity to form smooth surface contacts by hammering, which led to high van der Waals force. High current behavior was dominated by the formation of Au nanowires that bridge the contact during separation. Data suggest the presence of an adventitious film containing carbon and oxygen. Aging of the contacts in air was found to reduce adhesion.

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Section: Actuation Schemesmentioning

confidence: 99%

Fundamental studies of Au contacts in MEMS RF switches

2005

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“…The pull-in voltage dictates the limited performance of the investigated device that is the voltage at which the system becomes irreversible unstable. Following the equilibrium of forces of a lump mass model it has been found that [1] the microcantilever beam subjected to the pull-in voltage will be attracted by the substrate and will reach a distance the corresponds to 2/3 of the initial gap, moment at which the structure will become irreversible unstable. The open literature includes many contributions that report the results of the theoretical and experimental findings in conjunction with the operation of micro-fabricated cantilever structures interacting with different types of electric fields.…”

Section: Introductionmentioning

confidence: 99%

“…These methods are applicable to a Duffing equation as it is not a stiff equation. Another approach assumes small deflections of the structures involved and the results are compared with the experimental data [1]. This method is not very suitable due to the nature of the large deflection of micro-cantilever beams in electric field [7].…”

Section: Introductionmentioning

confidence: 99%

Nonlinear Analysis of Pull-In Voltage of Twin Micro-Cantilever Beams

Changizi¹,

Stiharu²

2017

IJMEM

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“…This represents the classical problem [1][2][3]. This case is verified assuming that the bottom beam is extremely thick (2m).…”

Section: Single Beam Pull-in Voltagementioning

confidence: 92%

“…According to the formulation yield by equilibrium of forces, it has been derived [1] that pull-in voltage occurs when the equivalent elastic suspended mass reaches the 2/3 of the original gap between the micro-cantilever beam and the substrate because of attraction of the electrodes on the substrate. The operation of micro-cantilever structures under the influence of different types of electric fields has been investigated.…”

Section: Introductionmentioning

confidence: 99%

Nonlinear Analysis of Pull-in Voltage of Twin Micro-Cantilever Beams with Different Dimensions

Changizi¹,

Sarafrazi²,

Stiharu³

2017

Proceedings of the 4th International Conference of Control, Dynamic Systems, and Robotics (CDSR'17)

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-Micro-cantilevers are micromechanical structures that are being used in detection and sensing as MEMS. The easy usage and the relatively simple fabrication of micro-cantilever beams make them stand as suitable candidates for a wide variety of engineering applications. Dynamic capability of micro-cantilever beams to withstand considerable impacts and even various static loadings make them useful in applications as AFM, inertial sensors, or flow applications. Specific configurations with micro cantilever beams could be used for more advanced applications such as liquid viscosity measurement. The main objective of this research is to investigate the nonlinear dynamic behaviour of two parallel micro cantilever beams with slightly different geometry under the condition of closed to pull-in voltage. The governing differential equations that model closely the dynamical behaviour microcantilever beams under electrostatic field are used in the formulation. The model is based on discreet 2 degree of freedom mass-springdamping. The electrostatic loading induces the dynamical behaviour of two parallel micro cantilever beams expressed in two differential equations that are nonlinear and stiff. A specific algorithm that optimizes the integration steps which is named ISODE is used to perform the computation. The time response and phase diagram to the step-voltage for the mass-spring-damper system is derived numerically and the pull-in voltage of the system is evaluated.

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Surface-micromachined electrostatic microrelay

Cited by 47 publications

References 1 publication

Fundamental studies of Au contacts in MEMS RF switches

Fundamental studies of Au contacts in MEMS RF switches

Nonlinear Analysis of Pull-In Voltage of Twin Micro-Cantilever Beams

Nonlinear Analysis of Pull-in Voltage of Twin Micro-Cantilever Beams with Different Dimensions

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