Nonlinear Analysis of Pull-In Voltage of Twin Micro-Cantilever Beams

Changizi, M. Amin; Stiharu, Ion

doi:10.11159/ijmem.2017.002

Cited by 2 publications

(6 citation statements)

References 12 publications

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“…The solution of the system of ODEs by assuming two identical beams is illustrated by the time response and the phase portrait in figures 8 and 9. The results are identical to those in [4]. The plots show the beams response and phase diagram close to pull in voltage.…”

Section: The Two Beams Are Identicalsupporting

confidence: 78%

“…This case was studied previously by authors in [4]. That system was simplified to one nonlinear ODE.…”

Section: The Two Beams Are Identicalmentioning

confidence: 99%

“…The operation of micro-cantilever structures under the influence of different types of electric fields has been investigated. Modelling of the phenomenon as well as experimental works were reported [2,3,4]. The differential equation that describes the dynamic behaviour of the microsystem consisting of a micro-cantilever beam close to a rigid substrate charged at different potentials can lead to evaluate the pull-in voltage.…”

Section: Introductionmentioning

confidence: 99%

“…For an example the continuum theory for small-scale deflection was scrutinized for micro-cantilever beams and a set of orthogonal functions was established using Taylor series in the governing differential equation [11]. Also, for the small-scale deflection, recent investigations have revealed that the error is commensurate with the length of the beam [4]. The pull in potential remarkably reduces when the structure is dynamically excited at values below the pullin potential values when the structure is excited.…”

Section: Introductionmentioning

confidence: 99%

See 3 more Smart Citations

Nonlinear Analysis of Pull-in Voltage of Twin Micro-Cantilever Beams with Different Dimensions

Changizi¹,

Sarafrazi²,

Stiharu³

2017

Proceedings of the 4th International Conference of Control, Dynamic Systems, and Robotics (CDSR'17)

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-Micro-cantilevers are micromechanical structures that are being used in detection and sensing as MEMS. The easy usage and the relatively simple fabrication of micro-cantilever beams make them stand as suitable candidates for a wide variety of engineering applications. Dynamic capability of micro-cantilever beams to withstand considerable impacts and even various static loadings make them useful in applications as AFM, inertial sensors, or flow applications. Specific configurations with micro cantilever beams could be used for more advanced applications such as liquid viscosity measurement. The main objective of this research is to investigate the nonlinear dynamic behaviour of two parallel micro cantilever beams with slightly different geometry under the condition of closed to pull-in voltage. The governing differential equations that model closely the dynamical behaviour microcantilever beams under electrostatic field are used in the formulation. The model is based on discreet 2 degree of freedom mass-springdamping. The electrostatic loading induces the dynamical behaviour of two parallel micro cantilever beams expressed in two differential equations that are nonlinear and stiff. A specific algorithm that optimizes the integration steps which is named ISODE is used to perform the computation. The time response and phase diagram to the step-voltage for the mass-spring-damper system is derived numerically and the pull-in voltage of the system is evaluated.

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Section: The Two Beams Are Identicalsupporting

confidence: 78%

“…This case was studied previously by authors in [4]. That system was simplified to one nonlinear ODE.…”

Section: The Two Beams Are Identicalmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Nonlinear Analysis of Pull-in Voltage of Twin Micro-Cantilever Beams with Different Dimensions

Changizi¹,

Sarafrazi²,

Stiharu³

2017

Proceedings of the 4th International Conference of Control, Dynamic Systems, and Robotics (CDSR'17)

Self Cite

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show abstract

“…To overcome these issues, the vibration of two parallel micro-cantilever beams was assumed. The dynamics of twin micro-cantilever beams system was studied for first time on [14]. In this investigation the response of two symmetric micro-cantilever beams was investigated by analysing the vibrating response while subjected to a difference of potential close to the pull-in value.…”

Section: Introductionmentioning

confidence: 99%

Viscosity Measurement for Picoliter Liquid Volumes Using Twin Micro-Cantilever Beams

Changizi¹,

Stiharu²

2018

International Conference of Control, Dynamic Systems, and Robotics

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In this paper a novel method to measure viscosity of a liquid with a volume of fraction of pico-litre is presented. The measurement of viscosity keeps into account the effect of evaporation which can result in the total evaporation of the liquid in a short time. At the present time there are several standard methods to measure viscosity of a fluid. All methods require larger volume of liquid and it takes rather long time to measure viscosity. No effect of evaporation is considered in these methods given the large volume of fluid that is used. In the proposed method viscosity of a droplet is measured by considering that in ambient condition such small droplet evaporates in less than a second. The principle of measurement includes two parallel micro-cantilever beams for which their individual dynamic response could be measured. Micro-cantilever beams are being used in MEMS mostly as inertial sensors. In this research the small volume of liquid is assumed to be positioned between the two parallel micro-cantilever beams. The two micro-beams are assumed to be respond to the dynamic excitation with a non-linear response which will be proved below that is related to the viscosity of the fluid. The dynamic system was modelled as a discreet three degree of freedom massdamping-spring. The nonlinear differential equations governing the performance of the above mentioned system is further solved and the results are analysed. The initial deflection of micro-cantilever beams due to capillary force yields to the dynamic behaviour of micro-cantilever beams expressed in three differential equations that are nonlinear and stiff. The used algorithm to solve the coupled differential equations is called LSODE and in usually capable to perform the computation solution for the stiff system of nonlinear initial value differential equations. The time response and phase diagram of the deflection of the beams for the massspring-damper system are numerically derived and the results are compared for two circumstances: the liquid would not evaporate and the liquid evaporates. Conclusion with regards to the equipment capable to perform such measurements are drawn.

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Nonlinear Analysis of Pull-In Voltage of Twin Micro-Cantilever Beams

Abstract: -

Cited by 2 publications

References 12 publications

Nonlinear Analysis of Pull-in Voltage of Twin Micro-Cantilever Beams with Different Dimensions

Nonlinear Analysis of Pull-in Voltage of Twin Micro-Cantilever Beams with Different Dimensions

Viscosity Measurement for Picoliter Liquid Volumes Using Twin Micro-Cantilever Beams

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