2005
DOI: 10.1016/j.tsf.2005.06.033
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Surface induced bulk modifications of amorphous carbon nitride films by post-deposition oxygen and hydrogen plasma treatment

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Cited by 5 publications
(4 citation statements)
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“…Other than that, at the same deposition temperature, a-C:N has better structure as compared to the pure a-C. Small roughness indicates the lower grain boundaries, which can be related to the tendency of the particle to become more crystallite [15]. The roughness value obtained was similar to the one reported by Miyajima et al [16]. Table 1 provides the average roughness value for numerical comparison.…”
Section: Resultssupporting
confidence: 76%
“…Other than that, at the same deposition temperature, a-C:N has better structure as compared to the pure a-C. Small roughness indicates the lower grain boundaries, which can be related to the tendency of the particle to become more crystallite [15]. The roughness value obtained was similar to the one reported by Miyajima et al [16]. Table 1 provides the average roughness value for numerical comparison.…”
Section: Resultssupporting
confidence: 76%
“…Aside from that, at the same deposition temperature, a-C:N has a superior structure than pure a-C. Small roughness suggests lower grain boundaries, which can be linked to the particle's proclivity to crystallise (Hagouel, 2005). The acquired roughness value was close to that reported by (Miyajima et al, 2005).…”
Section: Structural Propertiessupporting
confidence: 66%
“…Thin film carbon nitride in its many forms has been well characterized. [32][33][34][35] Carbon nitride in its planar phase has been chemically synthesized as powder, in gram quantities, relatively recently. 36 This phase is analogous to graphite, but has both graphitelike ͑qua-ternary͒ and pyridine-like nitrogen atoms, while each carbon atom is bonded to three nitrogen atoms ͑Fig.…”
mentioning
confidence: 99%