Surface-Functionalized COMB Capacitive Sensors and CMOS Electronics for Vapor Trace Detection of Explosives

Strle, Drago; Štefane, Bogdan; Nahtigal, Uroš; Zupanič, Erik; Požgan, Franc; Kvasić, Ivan; Maček, Marijan; Trontelj, Janez; Muševič, Igor

doi:10.1109/jsen.2011.2168203

Cited by 16 publications

(12 citation statements)

References 17 publications

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“…The aim of this study was to understand the influence of different preparation parameters on morphology and structure of the APS modified Si‐surface in order to use it in microelectromechanical systems (MEMS), in particular for sensor application for vapor trace detection of explosive gases. In our previous study, we already showed that such modified surfaces can be used for detection of TNT molecules in MEMS, but the details about optimization of modification process are still missing …”

Section: Introductionmentioning

confidence: 99%

XPS and AFM characterization of aminosilanes with different numbers of bonding sites on a silicon wafer

Jakša

Štefane²,

Kovač

2013

Surface & Interface Analysis

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The aim of this work was the preparation and characterization of a silicon surface modified by different self‐assembled aminopropylsilanes with the purpose of using them in sensor applications. Single‐crystal silicon wafers (111) were modified with aminosilanes that have different numbers of bonding sites: 3‐aminopropyltrimethoxysilane (APTMS), 3‐aminopropyldiethoxymethylsilane (APRDMS) and 3‐aminopropylethoxydimethylsilane (APREMS). We deposited the self‐assembled layers from a solution of aminosilanes in toluene under various reaction conditions. The surface composition and the chemical bonding were determined using X‐ray photoelectron spectroscopy. Furthermore, the surface morphology was investigated using atomic force microscopy. Our results show that the reactivity with the Si‐oxide layer and the polymerization of aminosilanes depend on the number of possible bonding sites. The APTMS reacted the most intensively with the Si‐oxide layer; a less intensive reaction was observed for the APRDMS; and the least intensive reaction was observed for the APREMS. Copyright © 2013 John Wiley & Sons, Ltd.

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Section: Introductionmentioning

confidence: 99%

XPS and AFM characterization of aminosilanes with different numbers of bonding sites on a silicon wafer

Jakša

Štefane²,

Kovač

2013

Surface & Interface Analysis

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“…The principle of NACs detection is simple since any explosive emits a rather small, but detectable number of molecules [4]. Based on the concentration in air at the equilibrium at a certain temperature, explosives can be divided into three groups: high, medium, and low vapor pressure, as illustrated in Figure 1 [5].…”

Section: Introductionmentioning

confidence: 99%

Semiconducting Metal Oxides Nanocomposites for Enhanced Detection of Explosive Vapors

Marchisio¹,

Tulliani²

2018

Ceramics

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Abstract:In recent years, the detection of ultratraces of nitroaromatic compounds (NACs), such as 2,4,6-trinitrotoluene (TNT), has gained considerable attention due to associated problems related to environment, security against terrorists and health. The principle of NACs detection is simple since any explosive emits a rather small, but detectable number of molecules. Thus, numerous detection techniques have been developed throughout the years, but their common limitations are rather large sizes and weights, high power consumption, unreliable detection with false alarms, insufficient sensitivity and/or chemical selectivity, and hyper-sensitivity to mechanical influences associated with very high price. Thus, there is a strong need of cheap, rapid, sensitive, and simple analytical methods for the detection and monitoring of these explosives in air. Semiconducting metal oxides (SMOs) allow the preparation of gas sensors able to partially or totally overcome these drawbacks, and this paper aims to shortly review the most recent SMOs nanocomposites able to sense explosives.

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“…The system is implemented in an extremely low-noise measurement detection chip, which can monitor atto-farad changes of the capacitance of chemically modified differential pairs of capacitors with comb-like electrodes. We showed that the system could detect vapour traces of TNT at the concentration of 1 TNT molecule in 10 12 molecules of carrier gas N 2 [ 8 ]. We also demonstrated that the sensitivity of this method is two orders of magnitude higher compared to the sensitivity of MEMS [ 9 ].…”

Section: Introductionmentioning

confidence: 99%

Chemical Selectivity and Sensitivity of a 16-Channel Electronic Nose for Trace Vapour Detection

Strle

Štefane

Trifkovič

et al. 2017

Sensors

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Good chemical selectivity of sensors for detecting vapour traces of targeted molecules is vital to reliable detection systems for explosives and other harmful materials. We present the design, construction and measurements of the electronic response of a 16 channel electronic nose based on 16 differential microcapacitors, which were surface-functionalized by different silanes. The e-nose detects less than 1 molecule of TNT out of 10+12 N2 molecules in a carrier gas in 1 s. Differently silanized sensors give different responses to different molecules. Electronic responses are presented for TNT, RDX, DNT, H2S, HCN, FeS, NH3, propane, methanol, acetone, ethanol, methane, toluene and water. We consider the number density of these molecules and find that silane surfaces show extreme affinity for attracting molecules of TNT, DNT and RDX. The probability to bind these molecules and form a surface-adsorbate is typically 10+7 times larger than the probability to bind water molecules, for example. We present a matrix of responses of differently functionalized microcapacitors and we propose that chemical selectivity of multichannel e-nose could be enhanced by using artificial intelligence deep learning methods.

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Surface-Functionalized COMB Capacitive Sensors and CMOS Electronics for Vapor Trace Detection of Explosives

Cited by 16 publications

References 17 publications

XPS and AFM characterization of aminosilanes with different numbers of bonding sites on a silicon wafer

XPS and AFM characterization of aminosilanes with different numbers of bonding sites on a silicon wafer

Semiconducting Metal Oxides Nanocomposites for Enhanced Detection of Explosive Vapors

Chemical Selectivity and Sensitivity of a 16-Channel Electronic Nose for Trace Vapour Detection

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