Surface functionalization of cyclic olefin copolymer by plasma‐enhanced chemical vapor deposition using atmospheric pressure plasma jet for microfluidic applications

Abstract

Lab‐On‐A‐Chips promise solutions for high throughput and specific analysis for environmental and health applications, with the challenge to develop materials allowing fast, easy, and cheap microfabrication and efficient surface treatment. Cyclic olefin copolymer (COC) is a promising thermoplastic, easily microfabricated for both rapid prototyping and low‐cost mass production of microfluidic devices but still needing efficient surface modification strategies. This study reports for the first time the optimization of an easy COC silica coating process by plasma‐enhanced chemical vapor deposition at atmospheric pressure with plasma jet and tetraethylorthosilicate as precursor, leading to a 158 ± 7 nm thickness and a 14‐day‐stability of hydrophilic properties for a COC‐embedded microchannel (100 µm), paving the way for a simplified and controlled COC surface modification.

A Review of Cyclic Olefin Copolymer Applications in Microfluidics and Microdevices

“…Bare COC is inherently hydrophobic, in order to improve the wetting of COC by fluids, the surface energy of COC should be increased. [57,[151][152][153][154][155] Various approaches have been proposed for altering the wettability of COCs including UV and ozone oxidation, grafting, and plasma treatment. [155] The most commonly employed approach of enhancing the wettability of a COC surface is plasma treatment.…”

“…[57,[151][152][153][154][155] Various approaches have been proposed for altering the wettability of COCs including UV and ozone oxidation, grafting, and plasma treatment. [155] The most commonly employed approach of enhancing the wettability of a COC surface is plasma treatment. Plasma treatment is carried out after creating the microchannel in the COC but before sealing it.…”

“…[ 57,151–155 ] Various approaches have been proposed for altering the wettability of COCs including UV and ozone oxidation, grafting, and plasma treatment. [ 155 ]…”

Enhanced capillary zone electrophoresis in cyclic olefin copolymer microchannels using the combination of dynamic and static coatings for rapid analysis of carnosine and niacinamide in cosmetics

“…Plasma treatment oxidizes inactive polymer surfaces, turning them into hydrophilic surfaces. The main advantage of this method is that it is environmentally friendly and can produce a uniform surface [29]. Photografting is carried out under UV light using a photoinitiator.…”

Investigation of 3‐aminopropyltrimethoxysilane for direct deposition of thin films containing primary amine groups by open‐air plasma jets

“…[1][2][3] In fact, APPJs can treat continuously complex geometries under atmospheric conditions, and unlike vacuum or controlled atmospheric pressure systems, no pumping is necessary. In addition, by injecting precursors in the postdischarge area, plasma-enhanced chemical vapor deposition using the APPJ process has been shown to be an efficient approach to deposit metal-oxide/carbide, [4][5][6] siliconoxide/carbide, [7][8][9] and organic coatings. [10][11][12][13] Furthermore, this technique is less invasive mainly because functional moieties present in the precursors, for example, amines [14] and carboxylic acids, [15][16][17] are preserved during the deposition process.…”