Surface elemental mapping via glow discharge optical emission spectroscopy

Gamez, Gerardo; Voronov, M.; Ray, Steven J.; Hoffmann, Volker; Hieftje, Gary M.; Michler, Johann

doi:10.1016/j.sab.2012.04.007

Cited by 28 publications

(21 citation statements)

References 25 publications

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“…3) His research group also published a review article about the image measurement in GD-OES, discussing on the lateral resolution related to several experimental parameters for operating glow discharge. 4) We have published a paper with respect to spatial variations in the emission intensity over the whole region of the glow discharge plasma. 5) A CCD detector was used for the imaging spectrometer system in our previous study.…”

Section: Introductionmentioning

confidence: 99%

Optimization of Discharge Parameters for a Glow Discharge Emission Spectrograph with Two-dimensional Spatial Resolution

Zhang

Wagatsuma

2020

ISIJ Int.

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This paper describes a specified measuring system for glow discharge emission spectrograph, which can provide a spatial/radial distribution of analyte atoms on the sample surface, while the conventional system provides only the information on the elemental distribution in depth direction. For this purpose, a spectrometer system consisting of an image spectrograph and an intensified charge coupled device (ICCD) detector was employed. The delay time and gate width of the ICCD detector was principally selected to improve the spatial resolution of the emitting zone. The objective of this paper was to determine an optimized set of the experimental parameter for better spatial resolution. The best spatial resolution was obtained when the gate width was 1 μs and the delay time was 60 μs. Better spatial resolution was obtained at narrower gate width, because the re-emission from the analyte atoms could be observed to a less extent when the observation was conducted more instantly just after start of the pulsed discharge.

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Section: Introductionmentioning

confidence: 99%

Optimization of Discharge Parameters for a Glow Discharge Emission Spectrograph with Two-dimensional Spatial Resolution

Zhang

Wagatsuma

2020

ISIJ Int.

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“…[1][2][3][4][5][6][7] In its current commercially available form, the attributes of GDOES include a broad dynamic range, good limits of detection, simultaneous multi-elemental analysis, excellent depth resolution (in the order of nanometers), as well as fast analysis (seconds to minutes). [1][2][3][4][5][6][7] In its current commercially available form, the attributes of GDOES include a broad dynamic range, good limits of detection, simultaneous multi-elemental analysis, excellent depth resolution (in the order of nanometers), as well as fast analysis (seconds to minutes).…”

Section: Introductionmentioning

confidence: 99%

Glow discharge optical emission spectrometry elemental mapping with restrictive anode array masks

Kroschk

Usala

Addesso

et al. 2016

J. Anal. At. Spectrom.

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Large-area surface elemental mapping is highly beneficial for a multitude of applications in fields from materials science to biology. Current typical methods, however, suffer from long acquisition times. Glow Discharge Optical Emission Spectrometry (GDOES), under pulsed-power and higher pressure operation, exhibits a great potential for ultrahigh throughput chemical imaging of large surface area samples. Up until now, various proof-of-principle studies of GDOES elemental mapping have only been applied to smaller surface area samples. Thus, there is a need for development of GDOES systems that allow for analysis of large area samples. Here, the design of different GD configurations for large area sample (10 cm diameter) analysis is investigated as a function of operating conditions such as pressure (133-4000 Pa), applied power (up to 5 kW), and pulsing. An open face electrode (OFE) design generatedundesirable heterogeneous plasma at the higher pressures required for achieving spatial resolution. On the other hand, a restrictive anode array mask (RAAM) design provided notable homogeneity within the same pressure range and enabled the lateral resolution of 1 mm diameter silver inclusions embedded in copper. RAAMS were designed varying thickness (3 mm and 12 mm), aperture size (4, 6, 8 mm), geometry, and grounding. Also, as the section sputtered is restricted to the area covered by the apertures, the RAAM provides the opportunity for subsequent analysis of the unsputtered regions via alternative methods. In addition, the RAAM permits higher power densities to be achieved within the limitations of the power supply. These findings help to pave the way for exploiting the full potential of GDOES and its ultrahigh throughput elemental mapping of large surface area samples.

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“…Recently, the use of GDOES under pulsed-mode operation and coupled to spectral imaging techniques has been proposed to perform surface elemental mapping. [7][8][9][10][11][12] This approach becomes interesting once it is realized that elemental maps of very large sample surfaces (e.g. 100 cm 2 ) could be obtained in a few tens of seconds, as proposed by Voronov et al 12 and Gamez et al, 10 which is several orders of magnitude faster than other techniques.…”

Section: Introductionmentioning

confidence: 99%

Image denoising techniques applied to glow discharge optical emission spectroscopy elemental mapping

Gamez

Mohanty

Michler

2014

J. Anal. At. Spectrom.

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Surface elemental mapping via glow discharge optical emission spectroscopy

Cited by 28 publications

References 25 publications

Optimization of Discharge Parameters for a Glow Discharge Emission Spectrograph with Two-dimensional Spatial Resolution

Optimization of Discharge Parameters for a Glow Discharge Emission Spectrograph with Two-dimensional Spatial Resolution

Glow discharge optical emission spectrometry elemental mapping with restrictive anode array masks

Image denoising techniques applied to glow discharge optical emission spectroscopy elemental mapping

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