Surface effect on the pull-in instability of cantilevered nano-switches based on a full nonlinear model

Dai, Huliang; Wang, Lin

doi:10.1016/j.physe.2015.05.031

Cited by 19 publications

(7 citation statements)

References 30 publications

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“…On the other hand, the stress in the surface area of the microbeam can be stated as 50,51 where τ 0 is the residual stress of the surface, E s and ε xx s are the surface Young’s module and strain, respectively.…”

Section: Modelmentioning

confidence: 99%

“…Applying the mentioned stresses, the bending moment of the microdetector will be derived as 50,51 where I b and I s are related to the second moment of area of the bulk and surface layer of the electrode, respectively.…”

Section: Modelmentioning

confidence: 99%

“…As another result, the mechanical strain energy of beams, including the surface layer terms will be given by 51 where…”

Section: Modelmentioning

confidence: 99%

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A thermosensitive electromechanical model for detecting biological particles

SoltanRezaee

Bodaghi

Farrokhabadi

2019

Sci Rep

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Miniature electromechanical systems form a class of bioMEMS that can provide appropriate sensitivity. In this research, a thermo-electro-mechanical model is presented to detect biological particles in the microscale. Identification in the model is based on analyzing pull-in instability parameters and frequency shifts. Here, governing equations are derived via the extended Hamilton’s principle. The coupled effects of system parameters such as surface layer energy, electric field correction, and material properties are incorporated in this thermosensitive model. Afterward, the accuracy of the present model and obtained results are validated with experimental, analytical, and numerical data for several cases. Performing a parametric study reveals that mechanical properties of biosensors can significantly affect the detection sensitivity of actuated ultra-small detectors and should be taken into account. Furthermore, it is shown that the number or dimension of deposited particles on the sensing zone can be estimated by investigating the changes in the threshold voltage, electrode deflection, and frequency shifts. The present analysis is likely to provide pertinent guidelines to design thermal switches and miniature detectors with the desired performance. The developed biosensor is more appropriate to detect and characterize viruses in samples with different temperatures.

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Section: Modelmentioning

confidence: 99%

Section: Modelmentioning

confidence: 99%

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A thermosensitive electromechanical model for detecting biological particles

SoltanRezaee

Bodaghi

Farrokhabadi

2019

Sci Rep

View full text Add to dashboard Cite

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“…In recent years, the rapid development of micro-nano scale manufacturing technology has led to the increasingly wide application of micro-nano electromechanical systems. Nano-switch [1,2] is the basic component for designing nanoelectromechanical systems. The nano-switch structure is usually composed of two parallel conductive electrodes, one of which is fixed and simulated grounding, and the other is movable.…”

Section: Introductionmentioning

confidence: 99%

Influence of temperature on the pull-in characteristics of nano-switches considering surface effect

yang,

wang,

song

2023

Ninth International Conference on Mechanical Engineering, Materials, and Automation Technology (MMEAT 2023)

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Based on the surface energy model, the surface effect is introduced. Through the principle of minimum potential energy, the control equations and boundary conditions of nano-switch considering surface effect, temperature change and temperature correction Casimir force are established. The nonlinear differential equation is solved by homotopy perturbation method. The results show that the increase of temperature will reduce the pull-in voltage of the nano-switch; the surface effect will increase the pull-in voltage of the nano-switch. And as the structure size increases, the pull-in voltage also increases. The Casimir force considering thermal correction will reduce the pull-in voltage, and its influence will increase with the increase of the distance between the two electrodes. Considering the edge effect of the electric field will also reduce the pull-in voltage value. This provides a theoretical basis for further understanding the pull-in characteristics of nano-switch and the design, calibration and application of nano-switch.

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“…The devices can be actuated using thermal [1], piezoelectric [2] or electrostatic methods [3][4]. Where the electrostatic actuation is mostly used for its simplicity, small space and negligible mass as well as accessibility to high frequency actuation [5][6][7], where the electrostatically actuated method is often utilized in MEMS. However, for electrostatically actuated MEMS, the terrible pullin phenomena will happen in MEMS as devices being actuated.…”

Section: Introductionmentioning

confidence: 99%

Study of Micro Cantilever Beam Sizes Effect on Pull-In Voltage

Lin¹,

Chiu²

2019

Proceedings of the 5th World Congress on Mechanical, Chemical, and Material Engineering

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Due to the importance of electrostatically actuated method used in MEMS, pull-in phenomena of devices needs more investigation. Effects of cantilever beam sizes on pull-in voltages are analysed in this work. Numerical simulation by using finite element software COMSOL Multiphysics is provided to analyze the pull-in phenomena. The results show that pull-in voltages will increase a little nonlinearly as gap between cantilever beam and ground electrode increasing. Initially, as the gap increasing, pull-in voltage increases with larger rate. But the increasing rate will decrease as gap increasing. If the gap is larger than 2 m, the increasing rate will become almost constant. That is, the pull-in voltage will increase linearly like as gap increasing larger than 2 m. And the pull-in voltage would increase linearly like for beam thickness increasing. Gap and beam thickness have almost the same effect on pull-in voltage. However, the beam width has the tiniest effect on pull-in voltage comparing with the other parameters. It is found that the pull-in voltages are almost the same as beam width increasing. And pull-in voltage decreases nonlinearly as beam length increasing. For the longer beam length, the pull-in voltage will reaches a limit values as beam length increasing. The beam length has the most significant effect on pullin voltage.

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Surface effect on the pull-in instability of cantilevered nano-switches based on a full nonlinear model

Cited by 19 publications

References 30 publications

A thermosensitive electromechanical model for detecting biological particles

A thermosensitive electromechanical model for detecting biological particles

Influence of temperature on the pull-in characteristics of nano-switches considering surface effect

Study of Micro Cantilever Beam Sizes Effect on Pull-In Voltage

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