Due to the importance of electrostatically actuated method used in MEMS, pull-in phenomena of devices needs more investigation. Effects of cantilever beam sizes on pull-in voltages are analysed in this work. Numerical simulation by using finite element software COMSOL Multiphysics is provided to analyze the pull-in phenomena. The results show that pull-in voltages will increase a little nonlinearly as gap between cantilever beam and ground electrode increasing. Initially, as the gap increasing, pull-in voltage increases with larger rate. But the increasing rate will decrease as gap increasing. If the gap is larger than 2 m, the increasing rate will become almost constant. That is, the pull-in voltage will increase linearly like as gap increasing larger than 2 m. And the pull-in voltage would increase linearly like for beam thickness increasing. Gap and beam thickness have almost the same effect on pull-in voltage. However, the beam width has the tiniest effect on pull-in voltage comparing with the other parameters. It is found that the pull-in voltages are almost the same as beam width increasing. And pull-in voltage decreases nonlinearly as beam length increasing. For the longer beam length, the pull-in voltage will reaches a limit values as beam length increasing. The beam length has the most significant effect on pullin voltage.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.
hi@scite.ai
10624 S. Eastern Ave., Ste. A-614
Henderson, NV 89052, USA
Copyright © 2024 scite LLC. All rights reserved.
Made with 💙 for researchers
Part of the Research Solutions Family.