Surface deep profile synchrotron studies of mechanically modified top-down silicon nanowires array using ultrasoft X-ray absorption near edge structure spectroscopy

Abstract

Atomic, electronic structure and composition of top-down metal-assisted wet-chemically etched silicon nanowires were studied by synchrotron radiation based X-ray absorption near edge structure technique. Local surrounding of the silicon and oxygen atoms in silicon nanowires array was studied on as-prepared nanostructured surfaces (atop part of nanowires) and their bulk part after, first time applied, in-situ mechanical removal atop part of the formed silicon nanowires. Silicon suboxides together with disturbed silicon dioxide were found in the composition of the formed arrays that affects the electronic structure of silicon nanowires. The results obtained by us convincingly testify to the homogeneity of the phase composition of the side walls of silicon nanowires and the electronic structure in the entire length of the nanowire. The controlled formation of the silicon nanowires array may lead to smart engineering of its atomic and electronic structure that influences the exploiting strategy of metal-assisted wet-chemically etched silicon nanowires as universal matrices for different applications.

Спектромикроскопические Исследования Пористого Оксида Кремния На Кремнии С Использованием Синхротронного Излучения

“…The XANES method allows obtaining information about the distribution of the local partial density of free electronic states in the conduction band according to [19,20]. This makes the XANES spectroscopy data extremely sensitive to the specifi city of the local atomic surrounding, which has been demonstrated many times before [8][9][10][11].…”

“…Such studies are important considering the developed surface which is accessible to external infl uences and may also be subjected to internal reconstruction. Xray and electron spectroscopy is an indispensable tool for accurate and qualitative studies of the physical and chemical state of a porous layer as a morphologically complex object with a pronounced surface and potentially numerous boundaries [8][9][10][11]. The use of synchrotron radiation sources in the X-ray spectral range allows increasing the accuracy of experiments for objects of small sizes and low intensities of a useful signal [8,10].…”

“…Xray and electron spectroscopy is an indispensable tool for accurate and qualitative studies of the physical and chemical state of a porous layer as a morphologically complex object with a pronounced surface and potentially numerous boundaries [8][9][10][11]. The use of synchrotron radiation sources in the X-ray spectral range allows increasing the accuracy of experiments for objects of small sizes and low intensities of a useful signal [8,10]. X-ray photoelectron spectroscopy [10] and XANES -X-ray absorption near edge structure [8][9][10][11] are in demand for studying the atomic and electronic structure of developed surfaces and accessible interfaces between micro-and nanostructured objects.…”

“…The use of synchrotron radiation sources in the X-ray spectral range allows increasing the accuracy of experiments for objects of small sizes and low intensities of a useful signal [8,10]. X-ray photoelectron spectroscopy [10] and XANES -X-ray absorption near edge structure [8][9][10][11] are in demand for studying the atomic and electronic structure of developed surfaces and accessible interfaces between micro-and nanostructured objects.…”

Engineering Porous Silicon Nanowires with Tuneable Electronic Properties

“…Right panel: Si-L edge of nanowires after three hours of sputtering. The reference spectra of c-Si, a-Si are taken from Ref [22]. and the c-SiO 2 and a-SiO 2 from Ref [23]…”