2008
DOI: 10.1016/j.vacuum.2008.04.052
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Surface coating of microparticles with tungsten carbide by using the barrel sputtering system

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Cited by 15 publications
(8 citation statements)
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“…The details of the polygonal barrel-sputtering method used in this study have been reported in the papers previously [24][25][26][27][28][29][30]. A plate of Pt (99.99% purity, 50 × 100 mm) or Ru (99.99% purity, 50 × 100 mm) was used as a target.…”
Section: Preparation Of Samplesmentioning
confidence: 99%
See 1 more Smart Citation
“…The details of the polygonal barrel-sputtering method used in this study have been reported in the papers previously [24][25][26][27][28][29][30]. A plate of Pt (99.99% purity, 50 × 100 mm) or Ru (99.99% purity, 50 × 100 mm) was used as a target.…”
Section: Preparation Of Samplesmentioning
confidence: 99%
“…The present authors have developed a new surface-modifying dry process named as the "polygonal barrel-sputtering method" [24][25][26][27][28][29][30]. Recently, we reported the preparation of electrocatalysts for PEFCs using this method [29,30].…”
Section: Introductionmentioning
confidence: 99%
“…The AC power for sputtering was supplied by RF power generation (13.56 MHz). Samples were prepared following reported procedures [17][18][19][20][21][22][23][24][25][26][27][28][29][30][31][32]. NaCl powder (particle size: 250 -500 μm, Kanto Chemical or The Salt Industry Center of Japan) was introduced into a hexagonal barrel and then the barrel was placed in a vacuum chamber.…”
Section: Preparation Of Samplesmentioning
confidence: 99%
“…Based on this background, we developed a novel surface modification method for powders using the sputtering technique, which we call the "polygonal barrel-sputtering method" [17][18][19][20][21][22][23][24][25][26][27][28][29][30][31][32]. The polygonal barrel-sputtering method has been successfully used for uniform surface modification of particles composed of metals [17], alloys [18], metal oxides [19][20][21][22][23][24], polymers [25][26][27], and carbon [28][29][30][31][32]. In this study, the surfaces of NaCl particles were modified with metal films using the polygonal barrel-sputtering method to demonstrate the application of our method to the surface modification of water-soluble and water-reactive powders.…”
Section: Introductionmentioning
confidence: 99%
“…Surface coating (or surface modification) has been recognized as one of the most advanced and intriguing methods to build tailored nanomaterials [13,14]. There are many deposition approaches that are widely used for the surface coating of a nanoscale object, such as sol-gel coating, self-assembly, and sonochemical processing [15][16][17][18].…”
Section: Introductionmentioning
confidence: 99%