ABSTRACT"Optofluidics" represents the marriage of optics, optoelectronics and nanophotonics with fluidics. Such integration represents a new approach for dynamic manipulation of optical properties at length scales both greater than and smaller than the wavelength of light with applications ranging from reconfigurable photonic circuits to fluidically adaptable optics to high sensitivity bio-detection currently under development. The capabilities in terms of fluidic control, mixing, miniaturization and optical property tuning afforded by micro-, nano-fluidics combined with soft lithography based fabrication provides an ideal platform upon which to build such devices. Here we present our technique for integrating soft lithography based nanofluidics with e-beam lithography defined silicon-on-insulator photonic crystals. We demonstrate nanofluidic addressability of single, sub-wavelength, defects within the planar photonic crystal and the dynamic tuning of the guided mode. In this paper we focus on the fabrication, integration and experimental details of this work.
INTRODUCTIONPhotonic crystals [1] are attractive for controlling optical propagation by introducing pre-engineered defects into an otherwise regular lattice to create spectral filters, tight bend waveguides, resonant cavities [2] and highly efficient lasers [3]. At present techniques for local refractive index modulation in photonic structures is limited to the exploitation of relatively weak non-linear material properties [4,5], where ∆n/n (where n is the index of refraction) on the order of 10 -3 or lower, and thus requiring either long interaction lengths, high operational power, or the incorporation of resonant elements to enhance the effect. Techniques such as mechanical deformation [6], thermooptics [7], liquid crystal infusion [8], liquid-fluid infusion [9,11] and others [12,15] offer much higher effective ∆n/n. At present, however, these methods rely on globally modifying the refractive index of the entire device. Thus whereas local tunability over small interaction lengths requires the high ∆n/n afforded by these global approaches, the ability to perform such manipulations with the sub-micron scale precision required for advanced photonic devices remains elusive. The development of such a technique could enable the creation of a new class of ultra-compact adaptable photonic circuits.Nanofluidics provides a solution that enables both localized control and high refractive index modulation. By using modern nanofabrication techniques fluidic networks can be built which confine flows on scales much smaller than the wavelength of the transmitted light and enable the direct infusement and exchange of liquids with interesting optical properties (e.g. varying refractive index, gain and non-linearity) directly into the nanophotonic structure. As a first step in the development of two dimensional reconfigurable photonic circuits, here we demonstrate the nanofluidic addressing of a single defect row of holes within a two dimensional photonic crystal. We begin...