Surface acoustic wave quasi-Bessel beams generated by symmetrically tilted interdigital transducers

Uluğ, Bülent; Kuruoğlu, Furkan; Yalçın, Yeşim; Erol, Ayşe; Sarcan, Fahrettin; Şahin, Ali; Çiçek, Ahmet

doi:10.1088/1361-6463/ac570c

Cited by 5 publications

(4 citation statements)

References 51 publications

(47 reference statements)

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“…[12][13][14] Various methods have been applied to excite Rayleigh-type SAW, among which electronic microdevices reliant on SAW propagation have been notably popular for their low manufacturing expenditure and high frequency. [15][16][17] SAW-based devices, which utilize interdigital transducers (IDT) to generate ultrasonic waves in piezoelectric crystals, find wide application in electronic equipment. [18][19][20] Obtaining precise dispersion curves across a broad frequency range is vital for determining film parameters using SAW technique.…”

Section: Introductionmentioning

confidence: 99%

Simultaneous Determination of Young's Modulus and Density of Ultrathin Low‐k Films Using Surface Acoustic Waves

Zhang,

Xiao,

Zhang

et al. 2024

Physica Status Solidi (a)

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The nondestructive testing (NDT) of mechanical properties in ultrathin low dielectric constant (low‐k) films is a major challenge in integrated circuit manufacturing. Young's modulus and density are closely related parameters for low‐k films. This study presents a method for NDT of Young's modulus and density of porous low‐k black diamond (SiOC:H, BD) films. A linear frequency modulation (LFM) surface acoustic wave (SAW) interdigital transducer (IDT) with a frequency range of 20–250 MHz is designed to generate SAW signals on the samples. The series of SAW waveforms obtained on the samples are processed to obtain experimental SAW dispersion curves across a broad frequency range. By comparing these experimental curves with theoretical dispersion curves, as well as their first‐order derivatives, Young's modulus and density of porous low‐k BD films with thicknesses of 100, 300, 500, and 1000 nm are characterized. To verify Young's modulus measurements from the SAW method, a control experiment using nanoindentation is conducted. The results demonstrate that the SAW method can reduce the impact of the substrate and is independent of the film thickness. This study presents a highly accurate measuring method for simultaneous multiparameter evaluation of ultra‐thin low‐k films.

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Section: Introductionmentioning

confidence: 99%

Simultaneous Determination of Young's Modulus and Density of Ultrathin Low‐k Films Using Surface Acoustic Waves

Zhang,

Xiao,

Zhang

et al. 2024

Physica Status Solidi (a)

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“…Recently, a SAW quasi-Bessel beam with a different propagation direction is constructed on the surface of LiNbO 3 by two straight IDTs distributed coaxially and symmetrically. 20 This research forms a quasi-Bessel beam propagating along the surface of LiNbO 3 . The local minima and maxima of displacement are along the propagation direction of the special quasi-Bessel beam.…”

mentioning

confidence: 99%

“…It has been proven to be feasible in generating quasi-Bessel SAW. 20 Regarding the second question, specific OEIDTs are designed to obtain the same optimal resonant frequency in different directions. Usually, the corresponding excitation frequency of IDTs is affected by finger width a and finger space b.…”

mentioning

confidence: 99%

Quasi-Bessel surface acoustic wave for dynamic acoustic manipulation

Shi,

Zhang,

et al. 2024

Applied Physics Letters

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Acoustic manipulation using surface acoustic wave has aroused widespread interest in life sciences, biomedical, and bioanalytical chemistry. Acoustic manipulation for different applications requires different acoustic fields. Bessel beams are non-diffractive and re-constructable, bringing possibility and versatility of acoustic manipulation integrated on microfluidic chips. To date, there are a few studies on constructing Bessel surface acoustic waves. Moreover, there is still a lack of dynamic acoustic manipulation using Bessel surface acoustic waves propagating along a surface of piezoelectric substrate with simple and high-precision devices. Here, we design a device with two omnidirectional equifrequency interdigital transducers to form a quasi-Bessel surface acoustic wave by means of coherent interference. The proposed device avoids influences of anisotropy on its operating frequency, making its quasi-Bessel beam accurately and stably conform to the predetermined design acoustic field. This acoustic field could control micrometer to submicrometer particles and dynamically move particles along lateral direction and axial direction of the propagation of quasi-Bessel beam. A phenomenon similar to negative force appeared when the two-micron spherical particles were manipulated. The quasi-Bessel beam formed by our device can provide a versatile movement for on-chip acoustic manipulation.

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“…[42,43] Wave focusing plays an important role not only in medical diagnosis and tumor hyperthermia, but also in nondestructive flaw detection techniques in engineering field. [44][45][46] The focusing of phonon flux in elastically anisotropic solids has been studied to realize quasi-one-dimensional thermal transport in bulk systems, [47][48][49][50] which is caused by the fact that the phase and group velocities do not point to the same direction. [47] This kind of phonon focusing is based on the particlelike picture of phonon, which depends critically on the anisotropy of crystals [51][52][53] but makes no use of the phase control.…”

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confidence: 99%

Phonon Focusing Effect in an Atomic Level Triangular Structure

Jiang

Lü

Chen

2023

Chinese Phys. Lett.

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The rise of artificial microstructures has made it possible to modulate the propagation of various kinds of wave, such as light, sound and heat. Among them, the focusing effect is a modulation function of particular interest. In this work, an atomic level triangular structure is proposed to realize the phonon focusing effect in single-layer graphene. In the positive incident direction, our phonon wave packet simulation results confirm that multiple features related to the phonon focusing effect can be controlled by adjusting the height of the triangular structure. More interestingly, a completed different focusing pattern and an enhanced energy transmission coefficient are found in the reverse incident direction. The detailed mode conversion physics is discussed based on the Fourier transform analysis on the spatial distribution of the phonon wave packet. Our study provides physical insights to achieving phonon focusing effect by designing atomic level microstructures.

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Surface acoustic wave quasi-Bessel beams generated by symmetrically tilted interdigital transducers

Cited by 5 publications

References 51 publications

Simultaneous Determination of Young's Modulus and Density of Ultrathin Low‐k Films Using Surface Acoustic Waves

Simultaneous Determination of Young's Modulus and Density of Ultrathin Low‐k Films Using Surface Acoustic Waves

Quasi-Bessel surface acoustic wave for dynamic acoustic manipulation

Phonon Focusing Effect in an Atomic Level Triangular Structure

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