Simultaneous Determination of Young's Modulus and Density of Ultrathin Low‐k Films Using Surface Acoustic Waves
Li Zhang,
Xia Xiao,
Jinsong Zhang
et al.
Abstract:The nondestructive testing (NDT) of mechanical properties in ultrathin low dielectric constant (low‐k) films is a major challenge in integrated circuit manufacturing. Young's modulus and density are closely related parameters for low‐k films. This study presents a method for NDT of Young's modulus and density of porous low‐k black diamond (SiOC:H, BD) films. A linear frequency modulation (LFM) surface acoustic wave (SAW) interdigital transducer (IDT) with a frequency range of 20–250 MHz is designed to generate… Show more
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