Surface Acoustic Wave Accelerometer

Hartemann, P.; Meunier, P.-L.

doi:10.1109/ultsym.1981.197599

Cited by 13 publications

(6 citation statements)

References 4 publications

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“…Figure 4(b) shows that the SAW frequency is decreased linearly with the increase of acceleration with a linear coefficient of 0.9999, showing an extraordinary linearity. The sensitivity was calculated to be about −41.8 Hz g −1 , which is much higher than that of a previous high-G SAW accelerometer [19]. We also compared the simulated results with those obtained using the MATLAB program (figure 4(c)), which shows a deviation of less than 3%, verifying the correctness of simulation results using the simulated software.…”

Section: Influence Of Transducer Dimensions On Performance Of Saw Acc...supporting

confidence: 64%

“…A typical SAW accelerometer utilizes a cantilever beam configuration, attached with a seismic mass, and the SAW device is attached on the cantilever beams for enhancing the sensitivity. In 1981, Hartemann et al implemented the first accelerometer based on SAW technology with two circular Y cut quartz membranes and inertial mass loads applied to the flexure, achieving a sensitivity of 10 kHz g −1 over a 20 g acceleration range [19]. In 2015, Wang et al designed a SAW accelerometer based on ST-X quartz cantilever beam and achieved a frequency sensitivity of 29.7 kHz g −1 , a good linearity and a lower detection limit of ∼1 × 10 −4 g [20].…”

Section: Introductionmentioning

confidence: 99%

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Versatile and effective design platform for surface acoustic wave accelerometers

et al. 2023

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Micro-Electro-Mechanical Systems (MEMS) accelerometers have great potentials for applications in aerospace, autonomous driving and consumer electronics. However, most of their working principles are based on capacitive and resistance types, which cannot be easily used for wireless and passive sensing, while surface acoustic waves (SAWs) are the key solution for this problem. Due to complex acoustic-electric-mechanical coupling during accelerator operations, currently, there needs an accurate, reliable, and efficient design and simulation platform to improve the structure and performance of SAW based accelerometers. In this work, we proposed an accurate, reliable, and efficient modeling platform to optimize designs of SAW accelerometers, using a double-ended cantilever beam structure as an example. This model integrated elastic acoustic effect and the coupled wave equations under both the mechanical and electrical loading using the finite element analysis, and obtained acceleration-frequency responses of the accelerators. We have systematically simulated effects of thickness of piezoelectric film, wavelengths, and structural parameters of cantilever beams, and the simulation results are well consistent with the theoretical results. Finally, using the developed model, we designed a high-G SAW accelerometer (up to 20000 g), which achieved a high sensitivity (-41.8 Hz/g) and excellent linearity (0.9999), and another high sensitivity accelerometer (3.02 KHz/g), with a good linearity (0.9999) over a 100 g acceleration range.

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Section: Influence Of Transducer Dimensions On Performance Of Saw Acc...supporting

confidence: 64%

Section: Introductionmentioning

confidence: 99%

Versatile and effective design platform for surface acoustic wave accelerometers

et al. 2023

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“…Hartemann et al present the first SAW accelerometer prototype using two circular quartz membranes that an inertial mass loads in flexure. A differential frequency signal from the dual-delay line oscillator was used to characterize the applied acceleration [3]. A heartening frequency sensitivity of 10 kHz g −1 over a 20 g acceleration range was achieved.…”

Section: Introductionmentioning

confidence: 99%

Surface acoustic wave acceleration sensor with high sensitivity incorporating ST-X quartz cantilever beam

Wang

Huang

Liu

et al. 2014

Smart Mater. Struct.

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The implementation and performance of a surface acoustic wave (SAW)-based acceleration sensor is described. The sensor was composed of a flexible ST-X quartz cantilever beam with a relatively substantial proof mass at the undamped end, a pattern of a two-port SAW resonator deposited directly on the surface of the beam adjacent to the clamped end for maximum strain sensitivity and a SAW resonator affixed on the metal package base for temperature compensation. The acceleration was directed to the proof mass flex of the cantilever, inducing relative changes in the acoustic propagation characteristics of the SAW traveling along the beams. The frequency signal from the differential oscillation structure utilizing the SAW resonators as the feedback element varies as a function of acceleration. The sensor response mechanism was analyzed theoretically, with the aim of determining the optimized dimension of the cantilever beam. The coupling of modes (COM) model was used to simulate the synchronous SAW resonator prior to fabrication. The oscillator frequency stability was improved using the phase modulation approach; the obtained typical short-term frequency stability ranged up to 1 Hz s −1 . The performance of the developed acceleration sensor was evaluated using the precise vibration table and was also evaluated in comparison to the theoretical calculation. A high frequency sensitivity of 29.7 kHz g −1 , good linearity and a lower detection limit (∼1 × 10 −4 g) were achieved in the measured results.

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“…Several groups have reported SAW acceleration sensor with different designs and geometries. Hartemann et al present the first SAW accelerometer prototype using the differential dual-delay-line oscillator on a circular thin diaphragm configuration [1]. Heartening frequency sensitivity of 10 kHz/g and good linearity were obtained over a 20 g acceleration range.…”

Section: Introductionmentioning

confidence: 99%

Enhanced sensitivity of a surface acoustic wave based accelerometer

Wang

Huang

Liu

et al. 2014

2014 IEEE International Ultrasonics Symposium

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This paper developed a surface acoustic wave (SAW) based accelerometer, it was composed of a flexible ST-X quartz cantilever beam with a relatively substantial proof mass at the undamped end, a pattern of two-port SAW resonator deposited directly on surface of the beam adjacent to the clamped end for maximum strain sensitivity, and a SAW resonator affixed on the metal package base for temperature compensation. The optimal dimensions of the cantilever beam were determined theoretically. Acceleration directed to the proof mass flex the cantilever, inducing relative changes in the acoustic propagation characteristics of the SAW traveling along the beams. The frequency signal from the differential oscillation structure utilizing the SAW resonators as the feedback element is used to characterize the applied acceleration. The sensor performance towards applied acceleration was evaluated by using the precise vibration table. High sensitivity, low detection limit and good linearity were observed in the acceleration experiments.

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Surface Acoustic Wave Accelerometer

Cited by 13 publications

References 4 publications

Versatile and effective design platform for surface acoustic wave accelerometers

Versatile and effective design platform for surface acoustic wave accelerometers

Surface acoustic wave acceleration sensor with high sensitivity incorporating ST-X quartz cantilever beam

Enhanced sensitivity of a surface acoustic wave based accelerometer

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