A novel wireless and passive surface acoustic wave (SAW) based temperature-compensated vibration sensor utilizing a flexible Y-cut quartz cantilever beam with a relatively substantial proof mass and two one-port resonators is developed. One resonator acts as the sensing device adjacent to the clamped end for maximum strain sensitivity, and the other one is used as the reference located on clamped end for temperature compensation for vibration sensor through the differential approach. Vibration directed to the proof mass flex the cantilever, inducing relative changes in the acoustic propagation characteristics of the SAW travelling along the sensing device, and generated output signal varies in frequency as a function of vibration. A theoretical mode using the Rayleigh method was established to determine the optimal dimensions of the cantilever beam. Coupling of Modes (COM) model was used to extract the optimal design parameters of the SAW devices prior to fabrication. The performance of the developed SAW sensor attached to an antenna towards applied vibration was evaluated wirelessly by using the precise vibration table, programmable incubator chamber, and reader unit. High vibration sensitivity of ∼10.4 kHz/g, good temperature stability, and excellent linearity were observed in the wireless measurements.
The implementation and performance of a surface acoustic wave (SAW)-based acceleration sensor is described. The sensor was composed of a flexible ST-X quartz cantilever beam with a relatively substantial proof mass at the undamped end, a pattern of a two-port SAW resonator deposited directly on the surface of the beam adjacent to the clamped end for maximum strain sensitivity and a SAW resonator affixed on the metal package base for temperature compensation. The acceleration was directed to the proof mass flex of the cantilever, inducing relative changes in the acoustic propagation characteristics of the SAW traveling along the beams. The frequency signal from the differential oscillation structure utilizing the SAW resonators as the feedback element varies as a function of acceleration. The sensor response mechanism was analyzed theoretically, with the aim of determining the optimized dimension of the cantilever beam. The coupling of modes (COM) model was used to simulate the synchronous SAW resonator prior to fabrication. The oscillator frequency stability was improved using the phase modulation approach; the obtained typical short-term frequency stability ranged up to 1 Hz s −1 . The performance of the developed acceleration sensor was evaluated using the precise vibration table and was also evaluated in comparison to the theoretical calculation. A high frequency sensitivity of 29.7 kHz g −1 , good linearity and a lower detection limit (∼1 × 10 −4 g) were achieved in the measured results.
This paper developed a surface acoustic wave (SAW) based accelerometer, it was composed of a flexible ST-X quartz cantilever beam with a relatively substantial proof mass at the undamped end, a pattern of two-port SAW resonator deposited directly on surface of the beam adjacent to the clamped end for maximum strain sensitivity, and a SAW resonator affixed on the metal package base for temperature compensation. The optimal dimensions of the cantilever beam were determined theoretically. Acceleration directed to the proof mass flex the cantilever, inducing relative changes in the acoustic propagation characteristics of the SAW traveling along the beams. The frequency signal from the differential oscillation structure utilizing the SAW resonators as the feedback element is used to characterize the applied acceleration. The sensor performance towards applied acceleration was evaluated by using the precise vibration table. High sensitivity, low detection limit and good linearity were observed in the acceleration experiments.
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