Superior Robust Ultrathin Single-Crystalline Silicon Carbide Membrane as a Versatile Platform for Biological Applications

Abstract

Micromachined membranes are promising platforms for cell culture thanks to their miniaturization and integration capabilities. Possessing chemical inertness, biocompatibility, and integration, silicon carbide (SiC) membranes have attracted great interest toward biological applications. In this paper, we present the batch fabrication, mechanical characterizations, and cell culture demonstration of robust ultrathin epitaxial deposited SiC membranes. The as-fabricated ultrathin SiC membranes, with an ultrahigh aspect ratio (length/thickness) of up to 20 000, possess high a fracture strength up to 2.95 GPa and deformation up to 50 μm. A high optical transmittance of above 80% at visible wavelengths was obtained for 50 nm membranes. The as-fabricated membranes were experimentally demonstrated as an excellent substrate platform for bio-MEMS/NEMS cell culture with the cell viability rate of more than 92% after 72 h. The ultrathin SiC membrane is promising for in vitro observations/imaging of bio-objects with an extremely short optical access.

Strain Effect in Highly‐Doped n‐Type 3C‐SiC‐on‐Glass Substrate for Mechanical Sensors and Mobility Enhancement

“…The RMS roughness of the smoothed wafer was found to be less than 0.5 nm as shown in Figure (a) which significantly improves the contact surface between SiC and glass during wafer bonding. The detail of the SiC‐smoothing process can be found elsewhere …”

Fibrillar Nanomembranes of Recombinant Spider Silk Protein Support Cell Co-culture in an In Vitro Blood Vessel Wall Model

“… 10 − 12 Thus, alternative materials and fabrication techniques have been investigated to generate replicas that better imitate the basement membranes. Several synthetic materials, that is, polydimethylsiloxane, 13 polytetrafluoroethylene (PTFE), 14 PET, 15 silicon carbide, 16 or silicon dioxide, 10 and biopolymers, such as collagen, alginate, Matrigel, and composites thereof, 17 − 21 have been utilized. Synthetic polymers feature excellent fabrication properties and robustness but are not biodegradable.…”

Highly sensitive 4H-SiC pressure sensor at cryogenic and elevated temperatures

“…In contrast, the superior mechanical strength, excellent corrosive/shock resistance and high stability at high temperatures position silicon carbide a promising material for extreme condition sensing. In fact, numerous SiC pressure sensors have been reported including capacitive and piezoresistive sensors [8][9][10]. For instance, Young et al characterized a 3C-SiC 100 capacitive pressure sensor with a sensitivity of 7.7 fF/torr at 400 • C [11].…”