2002
DOI: 10.1351/pac200274030475
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Superhard nanocomposite coatings. From basic science toward industrialization

Abstract: A variety of superhard coatings with Vickers plastic hardness exceeding 40 GPa have been reported by several research groups during the last five years (for recent reviews see refs [1,2]). However, one has to distinguish between superhard nanocomposites, such as nc-TiN/a-Si 3 N 4 , nc-TiN/a-Si 3 N 4 /a-and nc-TiSi 2 , nc-(Ti 1-x Al x )N/a-Si 3 N 4 , nc-TiN/TiB 2 , ncTiN/BN, etc. where the high hardness originates from the nanostrucutre and, therefore, remains stable upon annealing to high temperatures [1], and… Show more

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Cited by 50 publications
(17 citation statements)
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References 18 publications
(55 reference statements)
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“…Secara umum struktur kristal TiAlN adalah kristal kubus pusat muka (fase (Ti,Al)N) dan heksagonal (fase AlN) [4]. Pencapaian tertinggi sifat kekerasan lapisan logam transisi nitrida diperoleh melalui pembentukan lapisan super dan ultra keras (TiAl)N/Si3N4 dengan nilai kekerasan mendekati kekerasan intan dengan kestabilan termal hingga suhu 1200 0 C [5,6]. Nilai kekerasan lapisan TiAlN secara umum bersumber dari tegangan kompresif sisa yang akan berkurang saat lapisan diaplikasikan pada suhu tinggi.…”
Section: Senyawa Nitridaunclassified
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“…Secara umum struktur kristal TiAlN adalah kristal kubus pusat muka (fase (Ti,Al)N) dan heksagonal (fase AlN) [4]. Pencapaian tertinggi sifat kekerasan lapisan logam transisi nitrida diperoleh melalui pembentukan lapisan super dan ultra keras (TiAl)N/Si3N4 dengan nilai kekerasan mendekati kekerasan intan dengan kestabilan termal hingga suhu 1200 0 C [5,6]. Nilai kekerasan lapisan TiAlN secara umum bersumber dari tegangan kompresif sisa yang akan berkurang saat lapisan diaplikasikan pada suhu tinggi.…”
Section: Senyawa Nitridaunclassified
“…Hal ini terjadi melalui mekanisme segregasi fase secara termodinamika yang membawa pembentukan struktur nano secara spontan [6,11]. Struktur nano yang terbentuk adalah butir kristal nitrida (TiAlN) dikelilingi oleh matrik nitrida amorf (Si3N4) [12].…”
Section: Senyawa Nitridaunclassified
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“…Due to its interesting chemical and mechanical properties, titanium alloy is widely used in many applications [14]. One particular alloy, the Ti6Al4V, has the best performance among the dierent grades of titanium.…”
Section: Introductionmentioning
confidence: 99%
“…
It has recently been established that nanocomposite thin films are promising materials for applications as wear-resistant protective coatings [1][2][3]. These films consist of two or more nanocrystals embedded in an amorphous or nanocrystalline matrix.
…”
mentioning
confidence: 99%