Supercritical CO2 reactor for wafer-scale thin film deposition: reactor concept, numerical results, and Cu depositio.

Kondoh, Eiichi; Ueno, Takahiro; Kurita, Shuhei; Watanabe, Mitsuhiro; Yamamoto, Satoshi; Suemasu, Tatsuo

doi:10.1016/j.supflu.2015.05.021

Cited by 7 publications

(3 citation statements)

References 30 publications

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“…A summary diagram of resistivity data as function of the crystallite size and the deposit technique is reported in Fig. 3 [5,22,23,[37][38][39][40][41][42][43]. Resistivity values for very thin films obtained by thermal evaporation [39], using electroplating [41] and electroless plating [42] are also reported.…”

Section: Electrical Resistivitymentioning

confidence: 99%

A comparative study of copper thin films deposited using magnetron sputtering and supercritical fluid deposition techniques

et al. 2017

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:A comparison of crystallinity, microstructure, surface morphology and electrical conductivity is proposed for the deposition of copper films, using supercritical fluid chemical deposition (SFCD) and RF magnetron sputtering techniques. Both preparation methods yield nanocrystalline Cu films (< 100 nm) but SFCD gives access to a higher crystallinity for the same AlN substrate temperature during the deposit. Based on the film characteristics, a comparison of the evolution of electrical properties is done for RF magnetron sputtered copper films and SFCD ones with H2 as reducing agent. Uniform strain values are significantly reduced when SFCD technique is used and crystallinity is highly increased leading to lower resistivity values for a same crystallite size. This study demonstrates the viability of the SFCD technique to produce high quality nanostructured copper thin films with low resistivity values.

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Section: Electrical Resistivitymentioning

confidence: 99%

A comparative study of copper thin films deposited using magnetron sputtering and supercritical fluid deposition techniques

et al. 2017

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“…Thin-film deposition from scCO 2 has gained particular attention as a new deposition technique for microelectronics applications. [66,175,183,[185][186][187][188][189] The method is sometimes referred to as supercritical fluid deposition (SCFD). [188,189] SCFD is similar to a single-step SFRD and is particularly useful for the fabrication of Cu interconnects of ultra large-scale integration (ULSI) devices.…”

Section: Preparation Of Metallic Thin Films Using Sccomentioning

confidence: 99%

“…Apart from this, thin films of other metals such as Au, Ni, Pt, and bimetallic thin films can be deposited using SCFD. [66,175,183,[185][186][187][188][189]…”

Section: Metallic Interconnects In Integrated Circuitsmentioning

confidence: 99%

Synthesis of Metal Nanostructures Using Supercritical Carbon Dioxide: A Green and Upscalable Process

Siril

Türk

2020

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Metallic nanostructures have numerous applications as industrial catalysts and sensing platforms. Supercritical carbon dioxide (scCO2) is a green medium for the scalable preparation of nanomaterials. Supercritical fluid reactive deposition (SFRD) and other allied techniques can be employed for the mass production of metal nanostructures for various applications. The present article reviews the recent reports on the scCO2‐assisted preparation of zero‐valent metal nanomaterials and their applications. A brief description of the science of pure supercritical fluids, especially CO2, and the basics of binary mixtures composed of scCO2 and a low volatile substance, e.g., an organometallic precursor are presented. The benefits of using scCO2 for preparing metal nanomaterials, especially as a green solvent, are also being highlighted. The experimental conditions that are useful for the tuning of particle properties are reviewed thoroughly. The range of modifications to the classical SFRD methods and the variety of metallic nanomaterials that can be synthesized are reviewed and presented. Finally, the broad ranges of applications that are reported for the metallic nanomaterials that are synthesized using scCO2 are reviewed. A brief summary along with perspectives about future research directions is also presented.

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Sustainable Approaches for Materials Engineering With Supercritical Carbon Dioxide

Ushiki

Matsuyama

Smith

2020

Sustainable Nanoscale Engineering

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Supercritical CO2 reactor for wafer-scale thin film deposition: reactor concept, numerical results, and Cu depositio.

Cited by 7 publications

References 30 publications

A comparative study of copper thin films deposited using magnetron sputtering and supercritical fluid deposition techniques

A comparative study of copper thin films deposited using magnetron sputtering and supercritical fluid deposition techniques

Synthesis of Metal Nanostructures Using Supercritical Carbon Dioxide: A Green and Upscalable Process

Sustainable Approaches for Materials Engineering With Supercritical Carbon Dioxide

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