SuperCAST: a full free addressable memory array

Abstract

In this paper we present a full free addressable 4kb EEPROM memory array. This test structure based on CAST vehicle has been upgraded with flexible addressing logic to select any numbers of cells on single or multiple word lines. To this aim, column/row shift registers, to enable an easy cell biasing, have been implemented in an embedded non-volatile memory environment. High voltage circuits, driven by low voltage shift registers, are used to bias selected cells for electrical characterizations and reliability tests purposes. This kind of structure has been developed to improve the efficiency of electrical characterization laboratory, resulting in an enhanced acquisition with respect to standard CAST test techniques, opening the path to fine statistical analysis.