2012
DOI: 10.1021/nn304285m
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Super-resolution Optical Measurement of Nanoscale Photoacid Distribution in Lithographic Materials

Abstract: We demonstrate a method using photoactivation localization microscopy (PALM) in a soft-material system, with a rhodamine-lactam dye that is activated by both ultraviolet light and protonation, to reveal the nanoscale photoacid distribution in a model photoresist. Chemically amplified resists are the principal lithographic materials used in the semiconductor industry. The photoacid distribution generated upon exposure and its subsequent evolution during post-exposure bake is a major limiting factor in determini… Show more

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Cited by 21 publications
(20 citation statements)
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“…For example, material studies that utilized super-resolution techniques have successfully mapped polymer proton distribution24, mapped emitting sites within single conjugated polymer25, added tools for optimizing lithography techniques24, increased fundamental insight on hot-spot formation in nanostructures26, directly observed catalytic effects of metallic nanoparticles on a molecular scale27, and tracked single polymer molecules28. The vast majority of optical super-resolution technologies rely on extrinsic contrast agents.…”
mentioning
confidence: 99%
“…For example, material studies that utilized super-resolution techniques have successfully mapped polymer proton distribution24, mapped emitting sites within single conjugated polymer25, added tools for optimizing lithography techniques24, increased fundamental insight on hot-spot formation in nanostructures26, directly observed catalytic effects of metallic nanoparticles on a molecular scale27, and tracked single polymer molecules28. The vast majority of optical super-resolution technologies rely on extrinsic contrast agents.…”
mentioning
confidence: 99%
“…For example, in superresolution imaging of a static structure, the mean intensity of a nominally single emitter informs of whether the signal is the result of multiple emitters instead. 25 In applications of particle tracking in which the emitters are moving, there is a strong justification, after the experiment, for assuming a certain number of emitters. If there were a large number of independent emitters, then an undetected independence in motion and intensity of these emitters would imply an extraordinary correlation between the emitters, invalidating the assumption of independence.…”
Section: Measurement Frameworkmentioning
confidence: 99%
“…Vibration and drift of a microscope 25 can move the sample, potentially out of the field of view or depth of focus during the acquisition of data. This is a significant issue in tracking measurements with long intervals of data acquisition.…”
Section: Measurement Frameworkmentioning
confidence: 99%
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