Super-high sensitivity FBAR temperature sensor based on size effect of Ti insertion layer

Lin, Wenfang; Yun, Xiaofan; Wang, Xiaoyi; Zeng, Zhongming; Wang, Yiqun; Zhang, Xiaodong; Zhang, Baoshun

doi:10.1088/2053-1591/ac2099

Cited by 4 publications

(1 citation statement)

References 36 publications

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“…Te temperature coefcient of the FBAR sensor is usually 20 to − 35 ppm/ °C. But recently, the Suzhou Institute of Nano-tech and Nano-Bionics had conducted the research of temperature fuctuation compensation system within the FBAR sensor; thus, the temperature drift's infuence on frequency measurement would be weakened to some extent [31]. Above all, we calculated the sensitivity of this AlN FBAR sensor for acetone and ethanol detection, and compared it with the ZnO FBAR in previous literature [32].…”

Section: Experiments and Sensor Signalmentioning

confidence: 99%

A Film Bulk Acoustic Resonator-Based Sensor with AlN Piezoelectric Material for Detecting Ethanol and Acetone

Zhu

Feng

Lian

2022

Shock and Vibration

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Measurement of a volatile solution is essential for laboratory safety and hospital clinic safety. In this paper, we present an ethanol-sensing and acetone-sensing device using an AlN piezoelectric material-based film bulk acoustic resonator (FBAR). In order to realize volatile solution sensing, the AlN-based FBAR was designed, fabricated, and characterized. In our sensor structure, the upper electrode is a Ti/Au (30 nm/150 nm) composite electrode, the bottom electrode is Mo material with 150 nm thickness, and the piezoelectric sensing material is 0.8 μm thickness AlN. We conducted the experiment of ethanol measurement and acetone measurement by using this FBAR detector on the probe station within the vector network analyzer. The resonance frequency of the FBAR detector decreased as the concentration of ethanol increases, while under the circumstance of acetone concentration increasing, the detector’s response is the opposite. The sensing mechanisms of both ethanol measurement and acetone measurement are discussed in this paper, demonstrating that this FBAR detector could be able to distinguish acetone from ethanol due to different sensing mechanisms.

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Section: Experiments and Sensor Signalmentioning

confidence: 99%

A Film Bulk Acoustic Resonator-Based Sensor with AlN Piezoelectric Material for Detecting Ethanol and Acetone

Zhu

Feng

Lian

2022

Shock and Vibration

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Effect of phase correction produced by trimming layer on thin-film bulk acoustic resonator

Lin,

Zhang,

Huang

et al. 2024

Journal of Applied Physics

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This study investigates the influence of trimming layer thickness on the performance characteristics of thin-film bulk acoustic resonators (FBARs). By adjusting the thickness of the trimming layer, we aimed to optimize the resonant (fs) and antiresonant frequencies (fp), which are critical for the filter's performance in blocking or passing specific frequency bands. Employing theoretical modeling and experimental validation, we explored how variations in the trimming layer thickness affect the electromechanical coupling coefficient (kt2) and the overall energy efficiency of FBARs. The study also considered the impact of piezoelectric layer thickness on the effectiveness of these adjustments, revealing that thinner piezoelectric layers are more sensitive to changes in the trimming layer, enhancing the tuning capability for high-frequency applications. Our results confirm that reducing the trimming layer thickness increases both resonant and antiresonant frequencies, with a more pronounced effect on the latter, suggesting a significant phase correction effect from the trimming layer, resulting in the quality Q factor reductions. Our experimental results show that as the trimming layer thickness increases from 200 to 300 nm, the Q factor increases by 11%, while kt2 decreases by 4%. This research provides critical insights into the design and optimization of FBARs, offering guidelines that can help advance the development of more efficient and effective RF components for future mobile communication technologies.

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Nondestructive Wafer Level MEMS Piezoelectric Device Thickness Detection

Zhou

Zhang

2022

Micromachines

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This paper introduces a novel nondestructive wafer scale thin film thickness measurement method by detecting the reflected picosecond ultrasonic wave transmitting between different interfacial layers. Unlike other traditional approaches used for thickness inspection, this method is highly efficient in wafer scale, and even works for opaque material. As a demonstration, we took scandium doped aluminum nitride (AlScN) thin film and related piezoelectric stacking layers (e.g. Molybedenum/AlScN/Molybdenum) as the case study to explain the advantages of this approach. In our experiments, a laser with a wavelength of 515 nm was used to first measure the thickness of (1) a single Molybdenum (Mo) electrode layer in the range of 100–300 nm, and (2) a single AlScN piezoelectric layer in the range of 600–1000 nm. Then, (3) the combined stacking layers were measured. Finally, (4) the thickness of a standard piezoelectric composite structure (Mo/AlScN/Mo) was characterized based on the conclusions and derivation extracted from the aforementioned sets of experiments. This type of standard piezoelectric composite has been widely adopted in a variety of Micro-electromechanical systems (MEMS) devices such as the Piezoelectric Micromachined Ultrasonic Transducer (PMUT), the Film Bulk Acoustic Resonator (FBAR), the Surface Acoustic Wave (SAW) and more. A comparison between measurement data from both in-line and off-line (using Scanning Electron Microscope) methods was conducted. The result from such in situ 8-inch wafer scale measurements was in a good agreement with the SEM data.

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Super-high sensitivity FBAR temperature sensor based on size effect of Ti insertion layer

Cited by 4 publications

References 36 publications

A Film Bulk Acoustic Resonator-Based Sensor with AlN Piezoelectric Material for Detecting Ethanol and Acetone

A Film Bulk Acoustic Resonator-Based Sensor with AlN Piezoelectric Material for Detecting Ethanol and Acetone

Effect of phase correction produced by trimming layer on thin-film bulk acoustic resonator

Nondestructive Wafer Level MEMS Piezoelectric Device Thickness Detection

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