2006
DOI: 10.1016/j.surfcoat.2006.08.124
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Substrate influence in Young's modulus determination of thin films by indentation methods: Cubic boron nitride as an example

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Cited by 41 publications
(29 citation statements)
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“…Instrumented indentation testing, often called nano-indentation, is used for the mechanical characterization of thin coatings. The main challenge, which is subject of numerous prior research works, is to estimate the influence of the substrate on the measurements [2][3][4][5][6][7][8][9][10][11]. In order to evaluate the correct mechanical properties of a thin film, low loads and indentation depths are required.…”
Section: Introductionmentioning
confidence: 99%
“…Instrumented indentation testing, often called nano-indentation, is used for the mechanical characterization of thin coatings. The main challenge, which is subject of numerous prior research works, is to estimate the influence of the substrate on the measurements [2][3][4][5][6][7][8][9][10][11]. In order to evaluate the correct mechanical properties of a thin film, low loads and indentation depths are required.…”
Section: Introductionmentioning
confidence: 99%
“…During a small conference in Italy in 1999, the author learned of that concept and decided to work out a theory solving not only the problem for the mechanical contact of an indenter with general shape of symmetry of revolution, but also to extend this solution to layered structures [24]. Later on, he also presented a variety of applications together with Pharr, Chudoba, Richter and others [5,6,8,9,[25][26][27]. Soon, it became clear, however, that the "effective indenter theory", even though powerful, was not something one could easily give to the engineer or an indenter experimentalist and expect her or him to use it as a tool for the analysis of indentation data.…”
Section: About the Extension Of The Oliver And Pharr Methods To Analyzmentioning
confidence: 99%
“…Though, it was pointed out in case of superhard coatings in (10), (11) that this rule is insufficient to obtain precise results. Moreover, it should be noted that, for very thin films (few dozens of nanometers) performing an indentation at 10% of the thickness is limited by the precision of the apparatus, and indenter size problems.…”
Section: Introductionmentioning
confidence: 99%