2016 IEEE MTT-S International Microwave Symposium (IMS) 2016
DOI: 10.1109/mwsym.2016.7540103
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Substrate agnostic monolithic integration of the inline phase-change switch technology

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Cited by 27 publications
(13 citation statements)
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“…The integration of PCM technologies into high frequencies (including millimeter-wave domain) functions is based on their capacity to change from a conductive state, ON (crystalline phase) to an insulating sate, OFF (amorphous phase). The material's properties are controlled using the application of a thermal, electrical or optical stimulus [12]- [15]. The key advantage of PCM-based devices technology is the bi-stability, i.e.…”
Section: Electrical Properties and Optical Control Of Pcmmentioning
confidence: 99%
“…The integration of PCM technologies into high frequencies (including millimeter-wave domain) functions is based on their capacity to change from a conductive state, ON (crystalline phase) to an insulating sate, OFF (amorphous phase). The material's properties are controlled using the application of a thermal, electrical or optical stimulus [12]- [15]. The key advantage of PCM-based devices technology is the bi-stability, i.e.…”
Section: Electrical Properties and Optical Control Of Pcmmentioning
confidence: 99%
“…Thickness is defined by the technological stack and is of 300 nm here. [1] 10 5 Indirect GeSbTe [2] 9.3x10 3 Indirect GeSb [3] 1.4x10 3 Indirect…”
Section: B Electrical Characterizationmentioning
confidence: 99%
“…FoM -fs RON -Ω GeTethis work 9.18 1.7 GeSbTe [2] 38 10 GeSb [3] -49 GeTe [1] 15.5 1.1 GeTe [5] 15 2.4 SOI [6] 250 -IV. CONCLUSION A study of GeTe phase change material with direct heating used to realize RF switches was presented.…”
Section: Technologymentioning
confidence: 99%
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