Submicrometer patterning of YBa2Cu3O7−x

Elsner, Harald; IJsselsteijn, R.P.J.; Morgenroth, Wolfgang; Roth, H.-K.; Meyer, H.‐G.

doi:10.1016/s0167-9317(98)00094-x

Cited by 11 publications

(9 citation statements)

References 3 publications

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“…Already in the 1990s thin film high-T c YBa 2 Cu 3 O 7 (YBCO) sub-μm GBJs and SQUIDs have been fabricated using e-beam lithography [20,21].…”

Section: Introductionmentioning

confidence: 99%

“…More recently, sub-μm YBCO GBJs have also been fabricated by FIB [23], and both technologies enabled fundamental studies on transport and noise in high-T c sub-μm GBJs [22,[24][25][26]. Still, a significant degradation of j c for w 500 nm was found [20,21,23], and the use of deep sub-μm GBJs for the realization of nanoSQUIDs has not been explored yet. The motivation for the realization of sub-μm GBJs with widths well below 500 nm is based on the following considerations: first of all, operation in high magnetic fields in the Tesla range, as mentioned above, requires very accurate alignment of the applied magnetic field in the thin film plane in order to reduce coupling of the applied out-of-field component to the GBJ.…”

Section: Introductionmentioning

confidence: 99%

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Resistively shunted YBa₂Cu₃O₇grain boundary junctions and low-noise SQUIDs patterned by a focused ion beam down to 80 nm linewidth

Nagel

Konovalenko

Kemmler

et al. 2010

Supercond. Sci. Technol.

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YBa 2 Cu 3 O 7 24 • (30 •) bicrystal grain boundary junctions (GBJs), shunted with 60 nm (20 nm) thick Au, were fabricated by focused ion beam milling with widths 80 nm w 7.8 μm. At 4.2 K we find critical current densities j c in the 10 5 A cm −2 range (without a clear dependence on w) and an increase in resistance times junction area ρ n with an approximate scaling ρ n ∝ w 1/2. For the narrowest GBJs j c ρ n = I c R n ≈ 100 μV (with critical current I c and junction resistance R n), which is promising for the realization of sensitive nanoSQUIDs for the detection of small spin systems. We demonstrate that our fabrication process allows the realization of sensitive nanoscale dc SQUIDs; for a SQUID with w ≈ 100 nm wide GBJs we find an rms magnetic flux noise spectral density of S 1/2 ≈ 4 μ 0 Hz −1/2 in the white noise limit. We also derive an expression for the spin sensitivity S 1/2 μ , which depends on S 1/2 , on the location and orientation of the magnetic moment of a magnetic particle to be detected by the SQUID, and on the SQUID geometry. For the unoptimized SQUIDs presented here, we estimate S 1/2 μ = 390 μ B Hz −1/2 , which could be further improved by at least an order of magnitude.

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“…Already in the 1990s thin film high-T c YBa 2 Cu 3 O 7 (YBCO) sub-μm GBJs and SQUIDs have been fabricated using e-beam lithography [20,21].…”

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Resistively shunted YBa₂Cu₃O₇grain boundary junctions and low-noise SQUIDs patterned by a focused ion beam down to 80 nm linewidth

Nagel

Konovalenko

Kemmler

et al. 2010

Supercond. Sci. Technol.

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“…length and width significantly smaller than 1 ) [8]. Publication about YBCO submicron structure processing has emerged slowly, mainly based on the carbon mask technique [9], [10]. Starting from these works and others described in [11]- [13] concerning HTS HEB mixers for millimeter-wave or terahertz applications, we have developed a simple two-step process combining e-beam lithography and optical lithography.…”

Section: A Generalmentioning

confidence: 99%

Fabrication and Characterization of Ultrathin PBCO/YBCO/PBCO Constrictions for Hot Electron Bolometer THz Mixing Application

Peroz

Dégardin

Villégier

et al. 2007

IEEE Trans. Appl. Supercond.

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Superconducting Hot Electron Bolometer (HEB) mixers are a competitive alternative to conventional mixer technologies in the terahertz range because of their ultrawide bandwidth, high conversion gain, and low intrinsic noise level, even at 77 K. A technological process to realize HEBs based on high-Tc YBa 2 Cu 3 O 7 (YBCO) materials is described. Ultrathin 12 to 40 nm layers were sputtered on MgO (100) substrates, sub-micrometer constrictions (0 5 m 0 5 m) were etched on these and log-periodic gold antennas were then integrated. Good superconducting properties were measured after the whole process. Electrical transport characteristics of the device are discussed, ageing effects are considered and regular bolometric THz response results are given.Index Terms-Electrical transport, hot-electron bolometer, submicron structures, terahertz wave detection, YBCO ultrathin film.

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“…Publications about YBCO submicron structure processing started to emerge slowly, mainly based on the carbon mask technique 12,13 . Starting from these works and others described in 14,15,16 concerning HTS HEB mixers for millimeter-wave or terahertz applications, we have developed a simple twostep process combining e-beam lithography and optical lithography.…”

Section: Device Fabricationmentioning

confidence: 99%

Fabrication of high-Tc superconducting hot electron bolometers for terahertz mixer applications

et al. 2005

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Superconducting Hot Electron Bolometer (HEB) mixers are a competitive alternative to Schottky diode mixers or other conventional superconducting receiver technologies in the terahertz frequency range because of their ultrawide bandwidth (from millimeter waves to the visible), high conversion gain, and low intrinsic noise level, even at 77 K. A new technological process has been developed to realize HEB mixers based on high temperature superconducting materials, using 15 to 40 nm thick layers of YBa 2 Cu 3 O 7-(YBCO), sputtered on MgO (100) substrates by hollow cathode magnetron sputtering. Critical temperature values of YBCO films were found in the 85 to 91 K range. Sub-micron HEB bridges (0.8 µm × 0.8 µm) were obtained by combining electronic and UV lithography followed by selective etching techniques. Realization of YBCO HEB coupling to planar integrated gold antennas was also considered.

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Submicrometer patterning of YBa2Cu3O7−x

Cited by 11 publications

References 3 publications

Resistively shunted YBa₂Cu₃O₇grain boundary junctions and low-noise SQUIDs patterned by a focused ion beam down to 80 nm linewidth

Resistively shunted YBa₂Cu₃O₇grain boundary junctions and low-noise SQUIDs patterned by a focused ion beam down to 80 nm linewidth

Fabrication and Characterization of Ultrathin PBCO/YBCO/PBCO Constrictions for Hot Electron Bolometer THz Mixing Application

Fabrication of high-Tc superconducting hot electron bolometers for terahertz mixer applications

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Submicrometer patterning of YBa2Cu3O7−x

Cited by 11 publications

References 3 publications

Resistively shunted YBa2Cu3O7grain boundary junctions and low-noise SQUIDs patterned by a focused ion beam down to 80 nm linewidth

Resistively shunted YBa2Cu3O7grain boundary junctions and low-noise SQUIDs patterned by a focused ion beam down to 80 nm linewidth

Fabrication and Characterization of Ultrathin PBCO/YBCO/PBCO Constrictions for Hot Electron Bolometer THz Mixing Application

Fabrication of high-Tc superconducting hot electron bolometers for terahertz mixer applications

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Resistively shunted YBa₂Cu₃O₇grain boundary junctions and low-noise SQUIDs patterned by a focused ion beam down to 80 nm linewidth

Resistively shunted YBa₂Cu₃O₇grain boundary junctions and low-noise SQUIDs patterned by a focused ion beam down to 80 nm linewidth