Sub-picosecond 1030 nm laser-induced damage threshold evaluation of pulsed-laser deposited sesquioxide thin films

Stehlik, Marek; Govindassamy, Goby; Zideluns, Janis; Lemarchand, Fabien; Wagner, Frank; Lumeau, Julien; Mackenzie, Jacob I.; Gallais, Laurent

doi:10.1117/1.oe.61.7.070903

Cited by 2 publications

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“…Potentially, these devices offer better thermal resilience in high-power operation assuming that the intrinsic absorption is comparable with standard dielectric GWS. Moreover, we have demonstrated that the crystalline Sc 2 O 3 films have a high laser damage threshold [7]. The expectation is that all-dielectric crystalline GWS devices could enable operation at powers much higher than conventional materials currently allow.…”

Section: Introductionmentioning

confidence: 93%

Sc2O3 on sapphire all-crystalline grating–waveguide resonant reflectors

et al. 2023

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This paper reports the fabrication and first demonstration of all-dielectric crystalline grating–waveguide reflectors comprising a Sc2O3 waveguide grown on a sub-wavelength-patterned sapphire substrate. Rigorous coupled-wave analysis is employed to simulate the operation of the structure, suggesting a 100% resonance reflectivity in theory. Structuring of the sapphire substrate is achieved using inductively coupled plasma etching, whilst pulsed laser deposition is used for epitaxial growth of the Sc2O3 crystalline waveguide. Devices with distinct TE- and TM-polarisation resonances around 1030-nm for an angle of incidence near 10° are demonstrated, with reflectance approaching 90%. The discrepancy in reflectivity is attributed to the waveguide thickness variation and surface roughness. Refinement of the fabrication processes and tolerances should lead to improvement in the surface quality of the crystalline grating–waveguide structure and operation closer to the ideal resonance reflectivity.

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Section: Introductionmentioning

confidence: 93%

Sc2O3 on sapphire all-crystalline grating–waveguide resonant reflectors

et al. 2023

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“…Moreover, Sc 2 O 3 has the advantage of having a better lattice match with GaN compared to Gd 2 O 3 (9.2 and 20% mismatch, respectively), which minimises the number of defects at the interface [9]. The properties of Sc 2 O 3 make it particularly interesting for our intended application, namely the fabrication of crystalline dielectric mirrors with potentially excellent laser-damage resistance that will enable their operation with high average-and peak-power lasers [13].…”

Section: Introductionmentioning

confidence: 99%

Effect of laser repetition rate on the growth of Sc2O3 via pulsed laser deposition

et al. 2022

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This paper reports a study of the effect of laser pulse repetition rate and substrate temperature on the properties of crystalline Sc2O3 films grown on <0001>-oriented sapphire via pulsed laser deposition (PLD). For the range of substrate laser-heating powers investigated, optimum <111>-film growth was obtained at the highest available repetition rate of 100 Hz. Scanning electron microscopy and X-ray diffraction measurements revealed that a decrease in the repetition rate favours highly textured/island growth. The repetition rate was also proven to affect the lattice constant of the films, with a difference up to 0.3% between the films grown at high and low repetition rates. The general trend indicates that the out-of-plane lattice constant of the film shifts closer to the bulk value when the pulse repetition rate is increased. However, the lattice constant could also be reduced through in-situ post-growth annealing, which had the additional benefit of reducing the width of the (222) rocking curve peak. This work provides further evidence that energetic-PLD dynamics leads to higher quality PLD-grown crystalline films and for this material undermines the old adage that lower pulse repetition rates lead to higher quality thin-film crystalline growth.

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Sub-picosecond 1030 nm laser-induced damage threshold evaluation of pulsed-laser deposited sesquioxide thin films

Cited by 2 publications

References 0 publications

Sc2O3 on sapphire all-crystalline grating–waveguide resonant reflectors

Sc2O3 on sapphire all-crystalline grating–waveguide resonant reflectors

Effect of laser repetition rate on the growth of Sc2O3 via pulsed laser deposition

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