Sub-Micron Lithography Using InGaN Micro-LEDs: Mask-Free Fabrication of LED Arrays

Guilhabert, Benoit; Massoubre, David; Richardson, E.; McKendry, Jonathan J. D.; Valentine, G.J.; Henderson, Robert K.; Watson, I. M.; Gu, Erdan; Dawson, Martin D.

doi:10.1109/lpt.2012.2225612

Cited by 34 publications

(23 citation statements)

References 14 publications

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“…A flexible grating replicating the features of the master is then obtained. An atomic force microscopy (AFM) image and a profile scan of a typical grating fabricated this way can be found in [7]. Further fabrication details specific to each type of lasers are given in the following sub-sections.…”

Section: Structure Of the Mechanically-flexible Lasersmentioning

confidence: 99%

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Highly-photostable and mechanically flexible all-organic semiconductor lasers

Foucher¹,

Guilhabert²,

Kanibolotsky³

et al. 2013

Opt. Mater. Express

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This version is available at https://strathprints.strath.ac.uk/44172/ Strathprints is designed to allow users to access the research output of the University of Strathclyde. Unless otherwise explicitly stated on the manuscript, Copyright © and Moral Rights for the papers on this site are retained by the individual authors and/or other copyright owners. Please check the manuscript for details of any other licences that may have been applied. You may not engage in further distribution of the material for any profitmaking activities or any commercial gain. You may freely distribute both the url (https://strathprints.strath.ac.uk/) and the content of this paper for research or private study, educational, or not-for-profit purposes without prior permission or charge.Any correspondence concerning this service should be sent to the Abstract: Two formats of all-organic distributed-feedback lasers with improved photostability, respectively called nanocomposite and encapsulated lasers, are reported. These lasers are compatible with mechanically-flexible platforms and were entirely fabricated using softlithography and spin-coating techniques. The gain elements in both types of lasers were monodisperse -conjugated star-shaped macromolecules (oligofluorene truxene, T3). In the nanocomposites lasers, these elements were incorporated into a transparent polyimide matrix, while in the encapsulated devices a neat layer of T3 was overcoated with Poly(vinyl alcohol) (PVA). The T3-nanocomposite devices demonstrated a 1/e degradation energy dosage up to ~27.0 ± 6.5 J/cm 2 with a threshold fluence of 115 ± 10 µJ/cm 2 . This represents a 3-fold improvement in operation lifetime under ambient conditions compared to the equivalent laser made with neat organic films, albeit with a 1.6-time increase in threshold. The PVA-encapsulated lasers showed the best overall performance: a 40-time improvement in the operation lifetime and crucially no-trade-off on the threshold, with respectively a degradation energy dosage of ~280 ± 20 J/cm 2 and a threshold fluence of 36 ± 8 µJ/cm 2 .© 2013 Optical Society of America , 1985). 17. W. Zhao, T. Cao, and J. M. White, "On the origin of green emission in polyfluorene polymers: the roles of thermal oxidation degradation and crosslinking," Adv. Funct. Mater. 14(8), 783-790 (2004). 18. L. Cerdán, A. Costela, G. Durán-Sampedro, I. García-Moreno, M. Calle, M. Juan-y-Seva, J. de Abajo, and G. A.Turnbull, "New perylene-doped polymeric thin films for efficient and long-lasting lasers," J. Mater. Chem. Immergut, and E. A. Grulke, Polymer Handbook (Wiley, 1999). 32. J. Chilwell and I. Hodgkinson, "Thin-films field-transfer matrix theory of planar multilayer waveguides and reflection from prism-loaded waveguides," J. Opt. Soc. Am. 1(7), 742-753 (1984). 33. S. Riechel, U. Lemmer, J. Feldmann, S. Berleb, A. G. Mückl, W. Brütting, A. Gombert, and V. Wittwer, "Very compact tunable solid-state laser utilizing a thin-film organic semiconductor," Opt. Lett. 26(9), 593-595 (2001). 34. M. Lu, B. T. Cunningham, S.-J. Park...

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Section: Structure Of the Mechanically-flexible Lasersmentioning

confidence: 99%

“…They also benefit from potential low production cost and toxicity while their 'soft matter' nature offers great processing flexibility, enabling for example a wide range of novel bendable and mechanically-tunable devices such as OS lasers [2][3][4][5][6][7][8]. Wavelength electrical-tuning of OS lasers has also been shown [9][10][11].…”

Section: Introductionmentioning

confidence: 99%

Highly-photostable and mechanically flexible all-organic semiconductor lasers

Foucher¹,

Guilhabert²,

Kanibolotsky³

et al. 2013

Opt. Mater. Express

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“…Finally, the use of these light-structured LEDs was investigated for maskless photolithography, an application in which the compactness, high-brightness and high resolution of sources are key requirements. A 405 nm light-structured LED displaying 10 μm-wide bars separated by gaps of increasing width from 1 μm up to 10 μm (as shown in figure 1(b)) was used to investigate the resolution limit of the pattern transfer from the light-structured LED to a PR-coated sample using a custom-made imaging setup described previously [5]. An LED was driven at an injection current of 60 mA, providing an average optical power density of ∼1.3 W cm −2 on the test sample placed at the focal plane.…”

Section: Maskless Photolithographymentioning

confidence: 99%

Micro-structured light emission from planar InGaN light-emitting diodes

Massoubre

Xie

Guilhabert

et al. 2013

Semicond. Sci. Technol.

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Investigation of the surface modification of the p-type layer in GaN light-emitting diodes (LEDs) by exposure to a trifluoromethane plasma is reported. It is found that the plasma treatment reduces the conductivity of the p-GaN by several orders of magnitude, and when applied at room-temperature through a patterned mask, localized current channels into the active region of a p-in device are created. This provides a novel approach to laterally modulate the light emission from an LED over essentially planar areas. This technique allows the projection of high-resolution images from non-pixelated devices, and an example application of maskless pattern transfer with sub-micron features into photoresist is demonstrated.

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“…However, various emerging display applications, including wearable devices, head-mounted, and large-area displays require miniaturized chips composed of arrays of micro-scale LED elements (micro-LED) with high density with the lateral dimension down to less than 100 µm × 100 µm [1][2][3][4][5]. Due to the benefits provided by miniaturization, micro-LEDs are considered to possess great potential in multi-site neuron stimulation [6,7], miniaturized optoelectronic tweezers [8], optical cochlear implants [9], and mask-free lithography [10]. Additionally, a short differential carrier lifetime resulting from reduced capacitance and increased current density in micro-LEDs makes it also an appealing candidate for high-speed visible light communications (VLC) [11][12][13][14].…”

Section: Introductionmentioning

confidence: 99%

Micro-LEDs, a Manufacturability Perspective

et al. 2019

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Compared with conventional display technologies, liquid crystal display (LCD), and organic light emitting diode (OLED), micro-LED displays possess potential advantages such as high contrast, fast response, and relatively wide color gamut, low power consumption, and long lifetime. Therefore, micro-LED displays are deemed as a promising technology that could replace LCD and OLED at least in some applications. While the prospects are bright, there are still some technological challenges that have not yet been fully resolved in order to realize the high volume commercialization, which include efficient and reliable assembly of individual LED dies into addressable arrays, full-color schemes, defect and yield management, repair technology and cost control. In this article, we review the recent technological developments of micro-LEDs from various aspects.

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Sub-Micron Lithography Using InGaN Micro-LEDs: Mask-Free Fabrication of LED Arrays

Cited by 34 publications

References 14 publications

Highly-photostable and mechanically flexible all-organic semiconductor lasers

Highly-photostable and mechanically flexible all-organic semiconductor lasers

Micro-structured light emission from planar InGaN light-emitting diodes

Micro-LEDs, a Manufacturability Perspective

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