2021
DOI: 10.1016/j.actamat.2020.116536
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Sub-7-nm textured ZrO2 with giant ferroelectricity

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Cited by 30 publications
(30 citation statements)
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“…The PUND measurements for other samples are shown in Figure S10 in the Supporting Information. These P r values are near to those observed in sub-7 nm ZrO 2 films . The two switching contributions that appeared in DLCC and after PUND subtraction loops are reproducible in ZrO 2 films grown in different processes (see Figure S12 in the Supporting Information).…”
Section: Resultssupporting
confidence: 74%
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“…The PUND measurements for other samples are shown in Figure S10 in the Supporting Information. These P r values are near to those observed in sub-7 nm ZrO 2 films . The two switching contributions that appeared in DLCC and after PUND subtraction loops are reproducible in ZrO 2 films grown in different processes (see Figure S12 in the Supporting Information).…”
Section: Resultssupporting
confidence: 74%
“…These P r values are near to those observed in sub-7 nm ZrO 2 films. 19 The two switching contributions that appeared in DLCC and after PUND subtraction loops are reproducible in ZrO 2 films grown in different processes (see Figure S12 in the Supporting Information). The described PFM characterization allows us to safely conclude that the first current peak (at 3 V) can be ascribed to ferroelectric switching.…”
Section: ■ Results and Discussionmentioning
confidence: 88%
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“…21,22 Furthermore, it was reported that by performing PEALD in conjunction with the construction of the Pt surface structure, a large ferroelectricity comparable to a remanent polarization of approximately 50 μC/cm 2 could be achieved in an approximately 7 nm thick ZrO 2 film. 23 The control of the crystalline phase and ferroelectricity through the post-deposition process has not been reported, despite its technological importance in expanding the range of processes for the application of ZrO 2based ferroelectrics. Previously, with reference to the low-temperature degradation of ZrO 2 ceramics, 24,25 we demonstrated that wet annealing can drastically promote the t → o → m phase transition by comparing an approximately 17 nm thick HfO 2 film and ZrO 2 film, although dry O 2 annealing does not promote the t → o → m phase transition.…”
Section: ■ Introductionmentioning
confidence: 90%
“…Multiferroic materials have received considerable attention because of their potential application in electric and magnetic devices ( Fiebig et al., 2016 ; Huang et al., 2021 ; Hur et al., 2004 ; Jones et al., 2014 ; Spaldin and Ramesh, 2019 ). Within the materials, long-range orders such as ferroelectric and magnetic coexist and may interact strongly on each other, providing multi-tunable parameters for tailoring the macroscopic functionalities.…”
Section: Introductionmentioning
confidence: 99%