Sub-50-nm structure patterning by combining nanoimprint lithography and anisotropic wet etching without considering original mold resolution

Kuwae, Hiroyuki; Okada, Akiko; Shoji, Shuichi; Mizuno, Jun

doi:10.1016/j.mee.2016.11.019

Cited by 13 publications

(6 citation statements)

References 27 publications

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“…It also needs mask and resist, and the main difference is lain in the source of radiation . X‐ray radiation is selectively absorbed by the mask and thus a pattern could be formed . Multifunctional X‐ray lithography station at VEPP‐3 was considered by Goldenberg et al to fabricate microstructure, the spectrum of handling the specimens during irradiation was expanded and it became possible to vary the irradiation spectrum to separate the “soft” or “hard” component of the radiation spectrum.…”

Section: Fabrication Of Superhydrophobic Surfacementioning

confidence: 99%

Wetting Models and Working Mechanisms of Typical Surfaces Existing in Nature and Their Application on Superhydrophobic Surfaces: A Review

Jiaqiang

Deng

et al. 2017

Adv Materials Inter

112

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decades, researchers have shown great interests in bionics, which was a new multidisciplinary subject inspired by biological characteristics and features to imitate it to build technology devices. [1] With the rise of biomimetic biomaterial researches, a lot of attention was paid on the observation of living organism, especially on plant leaves, such as lotus, rice, taro leaves, etc. [2] As the development of scanning electron microscope (SEM), a wealth of data dealing with SEM of plant surface has been published since 1960s. [3] The cuticular structure was investigated with regard to function, and substances that were secreted onto the cuticle had great effects on the surface properties, while intracuticular waxes were the main barrier to wettability. [4] Some kinds of special wettability like superhydrophobicity and superhydrophilicity were also found in other surfaces, such as self-cleaning lotus leaf, [5] hydrophilicity of red rose petals, [6,7] the anisotropic dewetting behavior on rice leaf, [8,9] hydrophobicity of shark skin, [10] gecko toe, [11] insect wings, [12] etc., and striking superhydrophobic force provided by a water strider's legs, [13] and they were all related to the unique microstructures on their surface. In fact, the special wettability of surfaces is attributed to the interaction of both the surface microstructures and surface covers. As the development and progress of the observation device, smaller nanosized structures were found on the microstructure, and better properties of multiscale hierarchical structure was shown then. [14] Wetting is a phenomenon that solid interface was transferred from solid-gas interface to solid-liquid interface, wettability was a kind of ability that a liquid could be unfolded on one solid surface. The wettability of surface could be characterized by contact angle (CA) of interface. Sliding angle (SA) and contact angle hysteresis were introduced to evaluate the highly valued superhydrophobicity and superhydrophilicity of surfaces. Superhydrophilicity was defied as that of CA was smaller than 5°, superhydrophobicity was defied as that of CA was greater than 150°, as well as a really small sliding angle. It is worth noting that many researchers applied themselves to excavate the theories under the phenomena. Young's equation, Wenzel equation, and Cassie-Baxter equation [15,16] were the representations of hundreds years of research results. Improving and developing Surfaces of plants and animals are evolved to optimal states to accommodate environments better after billions of years of natural selection. As the development of further study on bionics, surfaces with special wetting properties in nature are discovered, extremely related to the micro-/nanostructures on surface. The wetting models and wetting mechanism of several surfaces in nature are investigated, followed by lifting the veil of superhydrophobic field. Various facile, effective, and convenient methods for fabricating superhydrophobic surfaces are obtained and optimized in scientific research and ...

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Section: Fabrication Of Superhydrophobic Surfacementioning

confidence: 99%

Wetting Models and Working Mechanisms of Typical Surfaces Existing in Nature and Their Application on Superhydrophobic Surfaces: A Review

Jiaqiang

Deng

et al. 2017

Adv Materials Inter

112

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“…High viscous UV curable resins generally exhibit high selectivity for dry etching [13] and various refractive indices [14]. The combination of the latter benefit with lab-on-a-chip [15][16][17] technology is expected to result in great progress in biology [18] and chemical engineering [19].…”

Section: Introductionmentioning

confidence: 99%

Non-Residual Layer Transfer of High Viscous Ultraviolet Photocurable Resin Using Liquid Transfer Technique

Ueda

Taniguchi

2018

J. Photopol. Sci. Technol.

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Ultraviolet-nanoimprint lithography (UV-NIL) is a next-generation lithographic technology. However, its usefulness is negatively affected by the formation of an extra resin layer between the curable resin pattern and the substrate, which is known as the residual layer (RL). Liquid-transfer imprint lithography (LTIL) is a promising technique for reducing the RL. However, it is difficult to ensure a thin RL with LTIL when using a high viscous UV curable resin. A technique combining LTIL and roll press can be used to overcome this drawback. High viscous UV curable resins generally possess high selectivity for dry etching and can exhibit various refractive indices. In this study, master molds were prepared with a patterned design and varying line and space values. The pattern ratio was 1:2, and the line widths were 990 nm, 540 nm, and 270 nm. UV curable resins with viscosities of 2900 mPa·s and 13090 mPa·s could be used to transfer the line and space patterns of three nanoscale widths to eliminate the RL, by using a repeated roll-press and LTIL technique and parallel plate UV-NIL.

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“…Nano & Life Innovation, Waseda University. Nanosized patterns were fabricated by UV-NIL and RIE according to our previous report 15 . First, a 200 nm thick silicon dioxide layer was deposited by IBS on a glass substrate as a nano structuring layer.…”

Section: Materials and Methods Titanium Substrates Grade 4 Pure Titamentioning

confidence: 99%

Biological reaction control using topography regulation of nanostructured titanium

Shiozawa

Takeuchi

Akiba

et al. 2020

Sci Rep

Self Cite

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The micro-and nanosize surface topography of dental implants has been shown to affect the growth of surrounding cells. in this study, standardized and controlled periodic nanopatterns were fabricated with nanosized surface roughness on titanium substrates, and their influence on bone marrow stromal cells investigated. Cell proliferation assays revealed that the bare substrate with a 1.7 nm surface roughness has lower hydrophilicity but higher proliferation ability than that with a 0.6 nm surface roughness. further, with the latter substrate, directional cell growth was observed for line and groove patterns with a width of 100 nm and a height of 50 or 100 nm, but not for those with a height of 10 or 25 nm. With the smooth substrate, time-lapse microscopic analyses showed that more than 80% of the bone marrow cells on the line and groove pattern with a height of 100 nm grew and divided along the lines. As the nanosized grain structure controls the cell proliferation rate and the nanosized line and groove structure (50-100 nm) controls cell migration, division, and growth orientation, these standardized nanosized titanium structures can be used to elucidate the mechanisms by which surface topography regulates tissue responses to biomaterials.

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Sub-50-nm structure patterning by combining nanoimprint lithography and anisotropic wet etching without considering original mold resolution

Cited by 13 publications

References 27 publications

Wetting Models and Working Mechanisms of Typical Surfaces Existing in Nature and Their Application on Superhydrophobic Surfaces: A Review

Wetting Models and Working Mechanisms of Typical Surfaces Existing in Nature and Their Application on Superhydrophobic Surfaces: A Review

Non-Residual Layer Transfer of High Viscous Ultraviolet Photocurable Resin Using Liquid Transfer Technique

Biological reaction control using topography regulation of nanostructured titanium

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