2021
DOI: 10.1021/acsaelm.0c00840
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Sub-5 nm Monolayer MoS2 Transistors toward Low-Power Devices

Abstract: Inspired by the recent achievements of the two-dimensional (2D) sub-5 nm MoS 2 field effect transistors (FETs), we use the ab initio quantum-transport methods to simulate the transport properties of the sub-5 nm gate-length monolayer (ML) MoS 2 MOSFETs. We find that the ML MoS 2 double-gated MOSFETs (DGFETs) with the 1, 3, and 5 nm gate length fail to meet the on-state current requirements in the International Technology Roadmap for Semiconductors (ITRS) for high-performance (HP) devices. However, both the ML … Show more

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Cited by 64 publications
(102 citation statements)
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“…Transition metal dichalcogenides (TMDCs) have been widely viewed as promising candidates in the next generation of nanophotonics [ 1 , 2 , 3 , 4 , 5 , 6 , 7 , 8 , 9 ], electronics [ 10 , 11 , 12 , 13 , 14 , 15 ] and valleytronics [ 16 , 17 , 18 , 19 , 20 , 21 , 22 , 23 ] due to their unique optical properties and spin-valley configurations. As characterized by interlayer van der Waal forces [ 24 ], optical properties of two-dimensional TMDCs are dominated by excitons and vary significantly with their layer index.…”
Section: Introductionmentioning
confidence: 99%
“…Transition metal dichalcogenides (TMDCs) have been widely viewed as promising candidates in the next generation of nanophotonics [ 1 , 2 , 3 , 4 , 5 , 6 , 7 , 8 , 9 ], electronics [ 10 , 11 , 12 , 13 , 14 , 15 ] and valleytronics [ 16 , 17 , 18 , 19 , 20 , 21 , 22 , 23 ] due to their unique optical properties and spin-valley configurations. As characterized by interlayer van der Waal forces [ 24 ], optical properties of two-dimensional TMDCs are dominated by excitons and vary significantly with their layer index.…”
Section: Introductionmentioning
confidence: 99%
“…The optimal I on of the ML silicane and MoS 2 MOSFETs at L g = 1, 3, and 5 nm are also shown for comparison. 41,42 For the ML InP HP transistors, I on enhances with increasing the gate length without UL, and only I on at L g = 5 nm exceeds the ITRS standards. After adding UL, I on could still reach the ITRS standards until L g is decreased to 2 nm.…”
Section: Resultsmentioning
confidence: 97%
“…The better HP performance of the ML InP MOSFETs is probably associated with the smaller electron m * of the ML InP (0.093 m e ) than the ML MoS 2 (0.45 m e ) and silicane (0.161 m e ). 41,42…”
Section: Resultsmentioning
confidence: 99%
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