Sub-100 nm-Resolution Grazing Incidence Soft X-Ray Microscope with a Laser-Produced Plasma Source

Aoki, Sadao; Ogata, Taro; Sudo, Shuuzou; Onuki, Tetsuji

doi:10.1143/jjap.31.3477

Cited by 47 publications

(7 citation statements)

References 5 publications

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“…Systems have been developed with 0.5 m resolution for scanning photoelectric yield and spectroscopy, 46 and an imaging microscope able to observe 40 nm features has been developed using a laserproduced-plasma source. 47 A suggestion from Kirkpatrick 48 led to the pointfocusing Kirkpatrick-Baez ͑KB͒ configuration. 49 The basic principle is to minimize the astigmatism of a single curved mirror by setting a second mirror of the same shape perpendicular to the first.…”

Section: A Grazing Incidence Microprobesmentioning

confidence: 99%

Instrumental aspects of x-ray microbeams in the range above 1 keV

Dhez

Chevallier

Lucatorto

et al. 1999

Review of Scientific Instruments

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X-ray microscopy has the capability of looking into normally opaque samples with high resolution. X rays are sensitive to elemental, structural, and chemical content and thus can provide microscopic maps of the composition and structure of a sample. X-ray microscopy has seen great growth in the last two decades in the number and types of operating instruments as well as their capabilities. This growth is due to two developments. The first is the development of high-brightness second- and third-generation synchrotron light sources that can be used with small-aperture optics. The second is a revolution in x-ray optics. In addition to the extension of commonly used visible optics, such as Fresnel zone plates and multilayer mirrors, into the x-ray regime, there has also been a dramatic improvement in grazing-incidence optics fabrication. In the range up to a few keV, Fresnel zone plates offer the highest resolution, which is below 100 nm in several instruments. Recent developments in fabrication may lead to their application at higher energies; for now, however, sub-μm diffractive microfocusing at higher energies is usually achieved by Bragg–Fresnel optics, Fresnel optics operated in reflection using either crystal planes or multilayer coatings. Although these offer very high resolution, they have small collection apertures and limited wavelength range of operation. The Kirkpatrick–Baez mirror combination remains the most popular and versatile microprobe in the x-ray regime. These systems can operate over a very broad energy range and several facilities are now operating with micron-scale resolution. We will discuss these and some newer types of x-ray focusing schemes.

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Section: A Grazing Incidence Microprobesmentioning

confidence: 99%

Instrumental aspects of x-ray microbeams in the range above 1 keV

Dhez

Chevallier

Lucatorto

et al. 1999

Review of Scientific Instruments

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“…Another related kind of instrument is the Wolter objective, where the combination of grazing incidence ellipsoidal and hyperboloidal mirrors is employed, in the same annular geometry, which has been used in a scanning photoemission microscope at the Photon Factory. 34 A kind of objective that has undergone a tremendous improvement in performance in the last few years is the Kirkpatrick-Baez arrangement, where two crossed grazing incidence mirrors separately focus in the vertical and horizontal directions [ Fig. 2(d)].…”

Section: Reflective Optical Elementsmentioning

confidence: 99%

“…Various types of photon optical elements are used in synchrotron radiation scanning photoelectron microscopes (SR-SPEM): mirrors of different shapes and combinations or diffractive elements are used, as shown in Table 1. 3,[25][26][27][28][29][30][31][32][33][34][35] The size of the focused beam in SR-SPEM's is determined by the diffraction limit of the optical systems; some diffractive optics have already achieved spatial resolution that is better than 30 nm in transmission, 13,24,39 but they cannot reach the high resolution expected for the state-of-the-art imaging microscopes. At present the best performing SR-SPEM has shown resolution in XPS mode that is less than 100 nm.…”

Section: General Introductionmentioning

confidence: 99%

Synchrotron Radiation Scanning Photoemission Microscopy: Instrumentation and Application in Surface Science

et al. 1999

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X-ray photoelectron spectroscopy has become a true microscopic technique at third generation soft X-ray synchrotron sources, finding applications in many domains of academic and applied research. This paper describes the present status of scanning photoemission microscopy, where by using photon optics the photon beam can be focused to micron or submicron dimensions and imaging or spectroscopy can be performed. It discusses different photon focusing optical elements and describes the major components of the constructed scanning microscopes. The applications of imaging and spectroscopy with high lateral resolution in surface science are illustrated, and some recent results obtained in different laboratories are briefly reviewed. Surf. Rev. Lett. 1999.06:265-286. Downloaded from www.worldscientific.com by NANYANG TECHNOLOGICAL UNIVERSITY on 08/21/15. For personal use only.

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“…Several kinds of Wolter mirrors, which can be used with soft ͑ϳ200 eV͒ to hard x rays ͑ϳ12 keV͒, have been developed, and a spatial resolution better than 100 nm has been achieved in the soft-x-ray region. [7][8][9][10] To determine the spatial distribution of a specific element using x-ray fluorescence imaging microscopes, two types of techniques can be proposed: one is to use two x-ray energies that are below and above the absorption edge of a specific element, and the other is to use polychromatic or quasimonochromatic x rays with a photon-counting technique. 11,12 The former requires a very bright x-ray source such as an undulator, while the latter requires a conventional bending-magnet x-ray source.…”

Section: Introductionmentioning

confidence: 99%

Application of a charge-coupled device photon-counting technique to three-dimensional element analysis of a plant seed (alfalfa) using a full-field x-ray fluorescence imaging microscope

Hoshino

Ishino

Namiki

et al. 2007

Review of Scientific Instruments

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A full-field x-ray fluorescence imaging microscope using a Wolter mirror was constructed at Photon Factory BL3C2. White x rays from a bending magnet were used to excite x-ray fluorescence and to enhance the x-ray fluorescence intensity. A photon-counting method using a charge-coupled device was applied to obtain an x-ray fluorescence spectrum at the image plane. The spatial distributions of some specific atoms such as Fe and Zn were obtained from photon-counting calculations. An energy resolution of 220 eV at the Fe Kalpha line was obtained from the x-ray fluorescence spectrum by the photon-counting method. The newly developed three-dimensional element mappings of the specific atoms were accomplished by the photon-counting method and a reconstruction technique using computed tomography.

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Sub-100 nm-Resolution Grazing Incidence Soft X-Ray Microscope with a Laser-Produced Plasma Source

Cited by 47 publications

References 5 publications

Instrumental aspects of x-ray microbeams in the range above 1 keV

Instrumental aspects of x-ray microbeams in the range above 1 keV

Synchrotron Radiation Scanning Photoemission Microscopy: Instrumentation and Application in Surface Science

Application of a charge-coupled device photon-counting technique to three-dimensional element analysis of a plant seed (alfalfa) using a full-field x-ray fluorescence imaging microscope

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