2016
DOI: 10.1063/1.4940975
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Sub-10 pW/Hz0.5 room temperature Ni nano-bolometer

Abstract: In this letter, we report on room temperature Ni nano-bolometers with a measured electrical noise equivalent power of 8.7 pW/Hz0.5 based on air-suspended and self-aligned nano-stack (SiO2/Ni/SiO2) structures, which is an outstanding electrical performance among uncooled micro/nano-bolometers. This result, together with electrical resistances of 172.6 Ω and modulation frequencies of 15–30 kHz, shows that Ni nano-bolometers can be easily coupled to terahertz antennas and are appropriate for fast passive imaging … Show more

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Cited by 14 publications
(7 citation statements)
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“…Understanding phonon transport is crucial to engineering novel nanoscale systems, such as thermal energy storage 1 3 , heat-assisted memory 4 , 5 , sensors 6 , 7 , and integrated nanoelectronics 8 , 9 . Previous studies of phonons in single crystalline silicon have established an increasingly comprehensive microscopic model of how phonons interact with introduced nanoscale features and boundaries 10 .…”
Section: Introductionmentioning
confidence: 99%
“…Understanding phonon transport is crucial to engineering novel nanoscale systems, such as thermal energy storage 1 3 , heat-assisted memory 4 , 5 , sensors 6 , 7 , and integrated nanoelectronics 8 , 9 . Previous studies of phonons in single crystalline silicon have established an increasingly comprehensive microscopic model of how phonons interact with introduced nanoscale features and boundaries 10 .…”
Section: Introductionmentioning
confidence: 99%
“…Given these multi-functional properties, CNT films allow for efficient broadband operation (while showing good PTE properties), efficient conversion of photo-irradiation power to electrical signals, and flexible adjustment and conformance to target structures. However, the photo-detection sensitivity of the existing PN-junction type CNT-film device (noise equivalent power (NEP) of 30 pWHz −1/2 ) 43 is still lower than that of state-of-the-art, solid-state, uncooled, broadband photo-detectors (sub-10 pWHz −1/2 ) 44 , 45 . This demonstrates a need to understand the device’s working mechanism.…”
Section: Resultsmentioning
confidence: 99%
“…For example, if to compare the sensitivity of two bolometers from different metals, by using the equality of resistance [3], [8], in this case the thickness of the resistive elements from low-resistivity metals will be an order of magnitude less than the thickness of the resistive elements from high-resistivity metals (for the same size of the sensitive area). Consequently, the bolometers based on the resistive elements with the smallest thickness will have the better sensitivity and performance.…”
Section: Estimationsmentioning
confidence: 99%
“…However, this approach is almost physically and technologically exhausted. At present, the minimum noise equivalent power of the uncooled metal microbolometers reaches several pW/Hz 1/2 with the resistive elements a few nanometers in thickness and a sensitive area of 10 1 -10 3 m 2 [3], [4]. To increase the sensitivity of the uncooled metal bolometers (10 times or more), there is a need in new methods.…”
Section: Introductionmentioning
confidence: 99%