Organic field-effect transistors (OFETs) are of great interest for applications in low-cost disposable electronic devices such as smart cards and radio-frequency identification tags, as well as in flexible-display driver circuits, nonvolatile memory, and sensors. [1][2][3][4][5][6] Several OFET devices containing organic semiconducting materials exhibit high electronic performance comparable to or surpassing those with amorphous hydrogenated silicon (a-Si:H). [7,8] . [9,10] For OFETs, high performance has been achieved by controlling the semiconducting molecular architecture as well as the film growth conditions via optimization of the substrate deposition temperature, deposition rate, and dielectric surface chemistry, all of which significantly affect crystalline morphology and structure in thermally evaporated films. As mentioned by the previous model of nucleation and growth of pentacene, [11] in particular, the molecular orientation and crystalline morphology of the first seeding layer strongly depend on molecule-substrate interactions, which can be controlled by surface functionalization, epitaxy, and the roughness of the gate dielectric. [10,[12][13][14][15] In general, gate-dielectric surface properties have been modified using self-assembled monolayers (SAMs). [10,14,15] For example, octadecyltrichlorosilane (OTS)-or hexamethyldisilazane (HMDS)-treated SiO 2 dielectrics enhance the fieldeffect mobility and decrease the gate leakage of most OFETs. [10,16] The dielectric surface has also been tuned by depositing a secondary polymer film onto a primary inorganic gate dielectric, because a polymeric dielectric by itself requires a very thick layer to achieve low gate leakage.[17] In contrast to SAM-treated SiO 2 dielectrics, one key advantage of polymer-coated gate dielectrics is that polymeric film deposition is not limited by SAM-inorganic coupling, which determines surface epitaxy and the coverage of SAMs.[18] Accordingly, many investigations have focused on simply processible bilayer dielectric strategies to enhance field-effect mobility, [19][20][21][22] yet the effect of both SAM-treated and polymer-coated dielectric surface properties on crystalline nanostructures and device performance of thermally evaporated semiconductors is seldom discussed. We herein elucidate crystalline morphologies and structures of pentacene in thin films that are vacuum-deposited on a surface-hydrophobicity-controlled ultrathin polymeric layer/ 300 nm thick SiO 2 bilayer gate-dielectrics with similar surface roughness. Synchrotron-based 2D grazing-incidence X-ray diffraction (2D GIXD) and atomic force microscopy (AFM) have uncovered that a dielectric with a higher surface energy than the lowest surface energy plane of pentacene induces a 3D island structure of the first seeding crystals, further growing two crystalline phases with different layer spacings and surface orientations. The field-effect mobility of pentacenebased OFETs can be enhanced by a factor of ca. 3 through optimizing surface energy of bilayer polymer/inorga...