Stylus-laser surface calibration system

Vorburger, Theodore V.; Song, Jun-Feng; Giauque, C. H. W.; Renegar, Thomas B.; Whitenton, Eric P.; Croarkin, M. C.

doi:10.1016/s0141-6359(96)00043-8

Cited by 10 publications

(6 citation statements)

References 6 publications

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“…Most NMIs have either primary instrumentation (see for example, [134,184,186,194]) or have secondary instrumentation which is calibrated via material measures, which have been in turn calibrated using primary instrumentation at another NMI.…”

Section: Profile Traceabilitymentioning

confidence: 99%

“…NIST provides a series of material measures, known as ''Standard Reference Materials'' (SRMs). Among them is a set of sinusoidal profile (Type C) material measures (SRMs 2073a, 2074 and 2075), which are calibrated for both roughness height (Ra) and spatial wavelength [184]. GAR produces both Type C and several series of Type D material measures.…”

Section: Commercially-available Materials Measuresmentioning

confidence: 99%

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Calibration and verification of areal surface texture measuring instruments

Leach

Giusca

Haitjema³

et al. 2015

CIRP Annals

101

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Section: Profile Traceabilitymentioning

confidence: 99%

Section: Commercially-available Materials Measuresmentioning

confidence: 99%

Calibration and verification of areal surface texture measuring instruments

Leach

Giusca

Haitjema³

et al. 2015

CIRP Annals

101

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“…In addition, PTB was the pioneer in producing highly uniform random roughness standards [77]. NIST, however, was the pioneer in producing sinusoidal profile standard reference materials [82,83,84].…”

Section: Discussionmentioning

confidence: 99%

Benchmarking the length measurement capabilities of the National Institute of Standards and Technology

Silver¹,

Land²,

Stone³

et al. 1998

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“…Gage blocks were invented and developed by others between 1910 and 1920 and substantially improved by a NIST-industry collaboration in the 1950s [ 13 , 6 ]. Modern counterparts to gage blocks are the NIST photomask linewidth standard [ 23 ], the NIST sinusoidal surface-roughness standard [ 31 , 32 ], and the NIST microelectronic overlay standard [ 33 ]. Each of these artifact standards, developed during the last two decades, required advancing the state-of-the-art of manufacturing processes for its production.…”

Section: Dimensional Metrology At Nist Todaymentioning

confidence: 99%

Length and dimensional measurements at NIST

Swyt¹

2001

J. Res. Natl. Inst. Stand. Technol.

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This paper discusses the past, present, and future of length and dimensional measurements at NIST. It covers the evolution of the SI unit of length through its three definitions and the evolution of NBS-NIST dimensional measurement from early linescales and gage blocks to a future of atom-based dimensional standards. Current capabilities include dimensional measurements over a range of fourteen orders of magnitude. Uncertainties of measurements on different types of material artifacts range down to 7×10−8 m at 1 m and 8 picometers (pm) at 300 pm. Current work deals with a broad range of areas of dimensional metrology. These include: large-scale coordinate systems; complex form; microform; surface finish; two-dimensional grids; optical, scanning-electron, atomic-force, and scanning-tunneling microscopies; atomic-scale displacement; and atom-based artifacts.

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Stylus-laser surface calibration system

Cited by 10 publications

References 6 publications

Calibration and verification of areal surface texture measuring instruments

Calibration and verification of areal surface texture measuring instruments

Benchmarking the length measurement capabilities of the National Institute of Standards and Technology

Length and dimensional measurements at NIST

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