Study on wetting properties of periodical nanopatterns by a combinative technique of photolithography and laser interference lithography

Yang, Yung Lang; Hsu, Chin Chi; Chang, Tien-Li; Kuo, Long-Sheng; Chen, Ping‐Hei

doi:10.1016/j.apsusc.2010.01.006

Cited by 59 publications

(23 citation statements)

References 35 publications

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“…In order to reproduce the lotus leaf's superhydrophobic effect on synthetic surfaces, a combination of chemical modification and patterning of the sample has been employed [86][87][88]. Several methods, from extruding of polymers [89] to femtosecond-laser microfabrication [74] have been proposed to design superhydrophobic surfaces [67,74,75,79,[81][82][83]88,90,91].…”

Section: Superhydrophobic Polymeric Surfacesmentioning

confidence: 99%

Ultrafast Laser Pulses for Structuring Materials at Micro/Nano Scale: From Waveguides to Superhydrophobic Surfaces

Corrêa

Almeida

et al. 2017

Photonics

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Abstract:The current demand for fabricating optical and photonic devices displaying high performance, using low-cost and time-saving methods, prompts femtosecond (fs)-laser processing as a promising methodology. High and low repetition femtosecond lasers enable surface and/or bulk modification of distinct materials, which can be used for applications ranging from optical waveguides to superhydrophobic surfaces. Herein, some fundamental aspects of fs-laser processing of materials, as well as the basics of their most common experimental apparatuses, are introduced. A survey of results on polymer fs-laser processing, resulting in 3D waveguides, electroluminescent structures and active hybrid-microstructures for luminescence or biological microenvironments is presented. Similarly, results of fs-laser processing on glasses, gold and silicon to produce waveguides containing metallic nanoparticles, analytical chemical sensors and surface with modified features, respectively, are also described. The complexity of fs-laser micromachining involves precise control of material properties, pushing ultrafast laser processing as an advanced technique for micro/nano devices.

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Section: Superhydrophobic Polymeric Surfacesmentioning

confidence: 99%

Ultrafast Laser Pulses for Structuring Materials at Micro/Nano Scale: From Waveguides to Superhydrophobic Surfaces

Corrêa

Almeida

et al. 2017

Photonics

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“…Others have studied the wetting properties and superhydrophobicity of surfaces, patterned by laser interference, for such applications as corrosion inhibition, microfluidic technology, self-cleaning window glass, and evaporation-driven nanopatterning [151,256]. Similarly, interference patterning has been used to create biomemetic structures as depicted in Figure 12(b), mimicking natural sub-micron patterns [257] such as bone material and shells exhibiting advantageous mechanical stability and dynamic surface properties [255].…”

Section: Surface Texturingmentioning

confidence: 99%

Multi-Beam Interference Advances and Applications: Nano-Electronics, Photonic Crystals, Metamaterials, Subwavelength Structures, Optical Trapping, and Biomedical Structures

Burrow

Gaylord

2011

Micromachines

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Abstract:Research in recent years has greatly advanced the understanding and capabilities of multi-beam interference (MBI). With this technology it is now possible to generate a wide range of one-, two-, and three-dimensional periodic optical-intensity distributions at the micro-and nano-scale over a large length/area/volume. These patterns may be used directly or recorded in photo-sensitive materials using multi-beam interference lithography (MBIL) to accomplish subwavelength patterning. Advances in MBI and MBIL and a very wide range of applications areas including nano-electronics, photonic crystals, metamaterials, subwavelength structures, optical trapping, and biomedical structures are reviewed and put into a unified perspective.

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“…Various methods, such as ion-beam roughening [11], focused-ion-beam milling (FIB) [12,13], template printing [6,10], current-induced local anodic oxidation [14], and others [15][16][17][18], are commonly used to fabricate micro/nano-structures. Laser interference lithography is an attractive fast, and maskless method to fabricate large-area periodical structures with simple equipment, which only needs a couple of minutes of exposure and development [19][20][21][22]. The principle is based on the interference of two coherent lights that form a horizontal standing wave for a grating pattern.…”

Section: Introductionmentioning

confidence: 99%

Nanotribological properties of silicon surfaces nanopatterned by laser interference lithography

Yang

Zhao

et al. 2013

J Russ Laser Res

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The problems caused by the adhesive force and friction force become more critical when the size of M/NEMS devices shrinks to micro/nano-scale. The nanotexture-patterned surface is an effective approach to reduce friction force on micro/nano-scale. Laser interference lithography is an attractive method to fabricate micro/nanotextures, which is maskless and allows large area periodical structures to be patterned by a couple of seconds' exposure in a simple equipment system. We fabricate various nanogrooves with different pitch and space width on silicon wafers by laser interference lithography and chemical etching. We investigate the nanotribological properties of the patterned surfaces by AFM/FFM. We show that friction on the nano/micro-scale is related to the coverage rate of the nanogrooves, which decreases with increase in the space width and decrease in the pitch.

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Study on wetting properties of periodical nanopatterns by a combinative technique of photolithography and laser interference lithography

Cited by 59 publications

References 35 publications

Ultrafast Laser Pulses for Structuring Materials at Micro/Nano Scale: From Waveguides to Superhydrophobic Surfaces

Ultrafast Laser Pulses for Structuring Materials at Micro/Nano Scale: From Waveguides to Superhydrophobic Surfaces

Multi-Beam Interference Advances and Applications: Nano-Electronics, Photonic Crystals, Metamaterials, Subwavelength Structures, Optical Trapping, and Biomedical Structures

Nanotribological properties of silicon surfaces nanopatterned by laser interference lithography

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