Mathematical model of oil free claw vacuum pump is presented. The model is based on energy balance differential equations of thermodynamic system of variable mass working body. Using the equations of coordinates transformation and contact line of rotors continuity condition, equations for geometry of сlaw pump working chamber on condition of rotors point connection are obtained. To evaluate the leakage through the rotor mechanism channels, their existence graphs are plotted and geometric parameters of the channels depending on rotors position are determined.As a result of modeling, dependence of pressure and temperature in suction and compression-discharge chambers on rotation angle at different rotary speeds and on different inlet pressures and relationship between pumping speed and inlet pressure are obtained.The comparison between calculated values and experimental data obtained for one-stage claw pump with identical rotors is carried out. The maximal difference between the calculated and experimental values does not exceed 15 %. The developed mathematical model is recommended for analysis of influence of rotors geometry on the working process parameters and pumping characteristics of an oil free claw pump. SUMMARY L A ∆ α δ RR δ S1 δ S2 δ RS R S FIGURE 1: Main dimensions of a claw vacuum pump.