The range of operation pressures of non‐contact vacuum pumps may reach six decades, and flow regime in slot channels of the rotor mechanism may vary from molecular flow to viscous flow. This article is a continuation of a series of authors‘ publications dedicated to the development of a method which makes it possible to calculate promptly the conductance of slot channels with complex contoured geometry with the minimal clearance at a certain point along gas flow direction for all three gas flow regimes: molecular, transient and viscous.
The numerical solution of the differential equations system (equations of motion, energy, continuity and state) is used for calculation of mass flow rate in transient gas flow regime. On the basis of the numerical calculation results the relationship is obtained which represents a smooth joining of the data for molecular and viscous flow regimes.
Verification of the model and the obtained relationship is carried out by comparison of numerical calculation results of gas mass flow rate and conductance with experimental data obtained by blowing‐through of slot channels. The maximal deviation of calculation according to the obtained relationship from the experiment does not exceed 14%, the average uncertainty being less than 8%, which makes it possible to recommend it for practical application in transient flow regime.
Казанский национальный исследовательский технологический университет, г. Казань, Российская Федерация Аннотация Ключевые слова Безмасляные спиральные вакуумные насосы широко распространены в нанотехнологиях, микроэлектронике, медицине, фармацевтике и термоядерной энергетике. Разработка новых типоразмеров насосов и улучшение существующих удельных характеристик возможна лишь на основе надежной математической модели рабочего процесса, позволяющей оценить влияние тех или иных факторов на процесс откачки. Выполнено математическое моделирование рабочего процесса безмасляного спирального вакуумного насоса с быстротой действия 12 м 3 /ч. Приведены результаты расчетов быстроты действия при различных частотах вращения приводного вала (согласование с экспериментом составляет ~ 20 %). Разработанную модель рабочего процесса безмасляного спирального вакуумного насоса можно рекомендовать для расчета откачных характеристик безмасляных спиральных вакуумных насосов Спиральный вакуумный насос, метод конечных объемов, быстрота действия, проводимость, обратные перетекания, процесс откачки
Experimental study of pumping characteristics of a pilot model of a claw single‐stage vacuum pump with identical rotors was carried out. The curves of pumping speed vs. pressure at different rotary speed and the ultimate pressure at different rotors speed were determined on a test unit. Indicator pressure diagrams in working chambers of claw vacuum pump were obtained with the help of special sensors.
Thus, an experimental data bank concerning the pumping characteristics of claw vacuum pump was created. It may be used for estimation of mathematical model adequacy and further development of the pump design.
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