Abstract:We
developed a novel process for fabricating oxygen-rich Zn(O,S)
buffer layers by magnetron reactive sputtering with a single oxygen-rich
Zn(O,S) target, suitable for industrial all-dry production. Then,
we successfully fabricated Cd-free Cu(In,Ga)(S,Se)2 (CIGSSe)
solar cells. By varying the oxygen partial pressure during sputtering
from 0 to 20%, we precisely controlled the Zn(O,S) composition, then
systematically investigated its effects on the quality of oxygen-rich
Zn(O,S) films, the properties of fo… Show more
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